Product description
Advanced Energy RFG 1251 RF generator, described as 2.4 kW, 208 VAC, 3-phase, 50/60 Hz in evidence.
Specifications and identifiers
supported details
| Vendor/model | Advanced Energy RFG 1251 Supported by repeated evidence |
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| Power rating | 2.4 kW Supported by one detailed title |
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| Input | 208 VAC, 3-phase, 50/60 Hz Supported by one detailed title |
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| Associated OEM context | Lam Research Appears in evidence but compatibility should be verified |
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Equipment context
- Lam Research plasma process tools
Applications
Plasma process toolsRF power delivery systemsLam Research RF subsystemsRF power generationPlasma source/bias powerGenerator replacement or refurbishment
How it works
An RF generator supplies radio-frequency power to plasma processes such as etch, deposition, and cleaning.
Correct RF power rating, frequency, and matching-system compatibility are critical for stable plasma operation.
What to verify before purchase
- Verify output frequency and power rating from nameplate
- Confirm Lam Research configuration and interlock interface
- Test under load with the correct match network
Confirm with the seller
- Exact frequency is not confirmed in all evidence
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.