ADVANCED ENERGY RFG1251 RF Generator 3155107-001, 105901AE RFG 1251 RF Generator Advanced Energy 3155107-001 LAM RFG1251 REFURBISEDAE RFG 1251 RF Generator Advanced Energy 3155107-001 LAM RFG1251 REFURBISEDAE RFG 1251 RF Generator Advanced Energy 3155107-001 LAM RFG1251 REFURBISEDAE RFG 1251 RF Generator Advanced Energy 3155107-001 LAM RFG1251 REFURBISEDAE RFG 1251 RF Generator Advanced Energy 3155107-001 LAM RFG1251AE RFG 1251 RF Generator Advanced Energy 3155107-001 LAM RFG1251ADVANCED ENERGY RFG1251 RF Generator 3155107-001, 105901AE RFG 1251 RF Generator Advanced Energy 3155107-001 LAM Research 13.56MHzAE RFG 1251 RF Generator Advanced Energy 3155107-001 LAM Research 13.56MHz3155107-001 / RFG 1251 RF GENERATOR 2.4KW 208VAC 3-PH 50-60HZ / ADVANCED ENERGY
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ADVANCED ENERGY 3155107-001

Advanced Energy RFG 1251 RF generator

Market Availability & Pricing

Part number3155107-001
ManufacturerADVANCED ENERGY
Current availabilitySee listings below
Latest completed listing with reported sales13500 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Electrical › RF Power › RF Generators
Advanced Energy RFG 1251 RF generator
ADVANCED ENERGY3155107-001RF generator
Product description
Advanced Energy RFG 1251 RF generator, described as 2.4 kW, 208 VAC, 3-phase, 50/60 Hz in evidence.
Specifications and identifiers
supported details
Vendor/modelAdvanced Energy RFG 1251
Supported by repeated evidence
Power rating2.4 kW
Supported by one detailed title
Input208 VAC, 3-phase, 50/60 Hz
Supported by one detailed title
Associated OEM contextLam Research
Appears in evidence but compatibility should be verified
Equipment context
  • Lam Research plasma process tools
Applications
Plasma process toolsRF power delivery systemsLam Research RF subsystemsRF power generationPlasma source/bias powerGenerator replacement or refurbishment
How it works

An RF generator supplies radio-frequency power to plasma processes such as etch, deposition, and cleaning.

Correct RF power rating, frequency, and matching-system compatibility are critical for stable plasma operation.

What to verify before purchase
  • Verify output frequency and power rating from nameplate
  • Confirm Lam Research configuration and interlock interface
  • Test under load with the correct match network
Confirm with the seller
  • Exact frequency is not confirmed in all evidence

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

ADVANCED ENERGY RFG1251 RF Generator 3155107-001, 105901

ADVANCED ENERGY RFG1251 RF Generator 3155107-001, 105901

USD 14900.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Sep 21, 2022 17:00 UTC
End recorded: Dec 6, 2024 22:57 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 30, 2026 16:18 UTC

Availability has not been rechecked; current availability is unknown.

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