Product description
Chemraz / Greene Tweed O-ring, ID 0.546 in, CSD 0.139 in, SC513/CPD 513, 80 durometer white context.
Specifications and identifiers
supported identity
| Material | Chemraz SC513 / CPD 513 High-performance elastomer compound context. |
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| Dimensions | ID 0.546 in; CSD 0.139 in Inside diameter and cross-section are repeatedly stated. |
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| Durometer/color | 80 duro, white Hardness and color context appears repeatedly. |
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| AS568 reference | #207 / 9207 Sizing reference appears in descriptions; verify packaging. |
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Applications
process chambersPVD/CVD/etch hardwarewafer-edge controlgas distribution or chamber shieldingChemical-resistant sealingVacuum or process sealing
How it works
A process-chamber mechanical or consumable component shaped for a specific wafer size, chamber location, or process module.
Geometry, material, coating, cleanliness, and wafer-size compatibility can directly affect plasma behavior, particle control, and fit.
Technical guide
possible
ceramic, quartz, silicon, aluminum, stainless steel, titanium, or coated metals may be used depending on the specific component; only listed materials should be treated as confirmed
- CVD
- chemical vapor deposition
- ESC
- electrostatic chuck
- HDP-CVD
- high-density plasma chemical vapor deposition
- PVD
- physical vapor deposition
What to verify before purchase
- Verify compound, lot/date code, packaging condition, and exact AS568 size.
Confirm with the seller
- Exact tool configuration and revision compatibility are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.