Applied Materials 3750-01112 TUBE PLASMA SOURCE SAPPHIRE 1/4VCR Astex AMATASTEX FI20101 TUBE PLASMA SOURCE SAPPHIRE AMAT 3750-01112, REV 1C, ASP, 11746630134 ASTEX TUBE PLASMA SOURCE SAPPHIRE 1/4VCR, AMAT 3750-01112 FI201012019 ASTEX TUBE PLASMA SOURCE SAPPHIRE 1/4VCR, AMAT 3750-01112 FI20101Applied Materials 3750-01112 Tube, Plasma Source Astex Model No. AX7610-5 Astex Model AX7610-5, Applied Materials 3750-01112 Plasma Source TubeAMAT APPLIED MATERIALS 3750-01112 QUARTZ PLASMA SOURCE TUBE ASTEX FI20101 Applied Materials 3750-01112 Tube, Plasma Source Astex Model No. AX7610-5 (used)Applied Materials 3750-01112 TUBE PLASMA SOURCE SAPPHIRE 1/4VCR (NEW) Astex AMATApplied Materials 3750-01112 TUBE PLASMA SOURCE SAPPHIRE 1/4VCR (NEW) Astex AMATApplied Materials 3750-01112 Tube, Plasma Source Astex Model No. AX7610-5 (used)Applied Materials 3750-01112 Tube, Plasma Source Astex Model No. AX7610-5 (used)
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APPLIED MATERIALS 3750-01112

Astex Sapphire Plasma Source Tube

Market Availability & Pricing

Part number3750-01112
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales1680 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Vacuum › Gas Delivery › Plasma Source Components
Astex Sapphire Plasma Source Tube
APPLIED MATERIALS3750-01112Plasma source tube
Product description
Applied Materials 3750-01112 Astex plasma source tube, described as sapphire or quartz plasma source tube with 1/4 VCR connection; associated with FI20101 and AX7610-5 references.
Specifications and identifiers
identification
Supplier/model contextAstex FI20101 / AX7610-5
Material wordingSapphire and quartz source-tube descriptions both occur; verify actual tube material
Connection1/4 VCR reported
Applications
PVD/CVD chamber kitsESC and cathode stacksprocess chamber liner and shield replacementRemote plasma source tube replacementGas/plasma delivery path componentPlasma source maintenance
How it works

A process-facing ring, liner, shield, or ceramic/quartz chamber component used around the wafer or chamber opening.

Geometry, material, surface condition, and cleanliness affect process uniformity, plasma behavior, particle risk, and fit.

Technical guide
alumina

ceramic material used where electrical insulation and plasma compatibility are needed

aluminum

common chamber hardware material when compatible with the process

quartz

high-purity silica glass used for plasma-facing or high-temperature parts

ESC
electrostatic chuck
PVD
physical vapor deposition
What to verify before purchase
  • Verify material marking and model number
  • Inspect tube for cracks, discoloration, or erosion
  • Confirm 1/4 VCR and plasma-source compatibility
Confirm with the seller
  • Exact tube material should be verified from markings

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

Applied Materials 3750-01112 TUBE PLASMA SOURCE SAPPHIRE 1/4VCR Astex AMAT

Applied Materials 3750-01112 TUBE PLASMA SOURCE SAPPHIRE 1/4VCR Astex AMAT

USD 13995.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Jul 27, 2016 00:51 UTC
End recorded: Dec 6, 2024 23:43 UTC
Estimated remaining at check: 2
Estimated sold at check: 0

eBay response captured — Checked Oct 18, 2026 16:13 UTC

Availability has not been rechecked; current availability is unknown.

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