TUNER 14-GUIDE WL 245GHZ 3KW SMARTMATCH AX360 3750-01147 Applied Materials3750-01147, AMAT, MKS Astex FI20166, Tuner 1/4-Guide WL 2.45 GHZ 3KW Stub21049 ASTEX SMART MATCH TUNER 1/4-GUIDE WL 2.45GHZ FI20166MKS Astex FI20166 SmartMatch Waveguide , AMAT 3750-01147 Astex FI20166 SmartMatch Waveguide, ASP Chamber, AMAT 3750-01147, 423978Applied Material P/N 3750-01147Applied Material P/N 3750-01147Applied Material P/N 3750-01147Applied Material P/N 3750-01147Applied Material P/N 3750-01147Astex Smart Match model F120166 applied material part no. 3750-01147
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APPLIED MATERIALS 3750-01147

MKS Astex SmartMatch Waveguide Tuner

Market Availability & Pricing

Part number3750-01147
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales4495.95 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Electrical › RF Power › Microwave Tuners
MKS Astex SmartMatch Waveguide Tuner
APPLIED MATERIALS3750-01147microwave waveguide tuner
Product description
MKS/Astex FI20166 SmartMatch 1/4-guide waveguide tuner for 2.45 GHz, 3 kW microwave/RF service.
Specifications and identifiers
identified features
Vendor/modelMKS Astex FI20166 SmartMatch
Vendor/model appears in evidence.
Frequency clue2.45 GHz
Frequency appears in evidence.
Power clue3 kW reported
Power rating appears in evidence; verify nameplate.
Waveguide type1/4-guide wavelength tuner
Evidence describes a waveguide tuner.
Applications
plasma process modulesPVD/CVD/etch RF systemsimpedance matchingRF power deliverymicrowave power tuningplasma source matchingAstex microwave subsystem service
How it works

An RF matching network or RF generator-related assembly used to couple RF power into a process load.

RF match and generator compatibility affects plasma stability, delivered power, reflected power, and process repeatability.

Technical guide
RF matching

Adjusts impedance between an RF generator and plasma/load to reduce reflected power.

RF
Radio frequency.
match
Impedance matching network.
What to verify before purchase
  • Confirm exact FI20166 configuration, frequency, power rating, interface, and waveguide/flange style.
  • Verify if this is standalone tuner or part of a larger SmartMatch assembly.
Confirm with the seller
  • Exact tool platform is not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

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