Product description
Applied Materials / Nor-Cal pneumatic isolation valve, part 3870-01161.
Specifications and identifiers
identification
| Valve type | Pneumatic isolation valve / angle valve |
|---|
| Supplier reference | Nor-Cal Products |
|---|
| Port reference | 1 in SST appears in source evidence Verify port size and flange type before use. |
|---|
Applications
vacuum isolationprocess gas deliveryload lock and chamber pumpingutility gas panelsvacuum line isolationprocess chamber or foreline isolationsemiconductor vacuum utility service
How it works
A valve controls isolation or flow in a vacuum, process gas, or utility line.
Valve type, actuation method, seal material, port size, and cleanliness class can be critical in semiconductor processing.
Technical guide
- isolation valve
- A valve used to open or block a vacuum or gas path.
- pneumatic
- Air-actuated operation.
What to verify before purchase
- Verify valve size/flange style
- Confirm actuator type and air pressure requirement
- Inspect seals and cleanliness
Confirm with the seller
- Exact Nor-Cal model number
- Seal material
- Normally-open/normally-closed behavior
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.