Product description
Pressure relief / vent valve adapter fitting for cryopump cassette load-lock context
Specifications and identifiers
supported identity
| Function | Pressure relief / vent valve adapter Supports venting or pressure-relief plumbing around cryopump/load-lock hardware. |
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| Context | Cryopump/cassette loadlock Application context appears repeatedly in the evidence. |
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| Material note | Aluminum appears in one shorthand title Material should be verified on the part. |
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Applications
vacuum forelines and chamber plumbinggas delivery panelsload-lock or cryopump support hardwareCryopump venting or relief plumbingCassette load-lock vacuum serviceVacuum fitting replacement
How it works
A relief valve adapter fitting is a vacuum or process-gas hardware component used to route, isolate, adapt, or seal gas/vacuum paths.
Correct valve and fitting selection is important for leak integrity, process cleanliness, and safe tool operation.
Technical guide
common
Stainless steel, aluminum, elastomer seals, or vendor-specific wetted materials may be used depending on the exact assembly.
vacuum_sealing
Vacuum fittings and valves rely on compatible sealing faces, gaskets, and actuator/control interfaces.
- NW/KF
- A clamp-style vacuum flange family used for vacuum plumbing.
- VCR
- A metal-gasket face-seal fitting style often used in high-purity gas systems.
What to verify before purchase
- Confirm whether the item is the adapter, the relief valve, or a combined fitting assembly.
- Verify material, thread/VCR/KF interface, and sealing method.
- Confirm compatibility with the specific cryopump/load-lock assembly.
Confirm with the seller
- Exact interface type and pressure relief setting are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.