Product description
Pneumatic diaphragm valve assembly, dual air-actuated, associated with 1/4 VCR and Swagelok 6LV-D6802P-CC references.
Specifications and identifiers
identified features
| Valve type | pneumatic diaphragm valve |
|---|
| Actuation | dual air-actuated |
|---|
| Connection noted | 1/4 VCR |
|---|
| Vendor/model reference | Swagelok 6LV-D6802P-CC |
|---|
Applications
gas deliveryvacuum isolationslit-valve and chamber valve systemsHigh-purity gas deliveryPneumatic process valve control
How it works
A process valve controls gas, vacuum, purge, or pneumatic flow in a semiconductor tool.
Valve replacement requires matching port style, actuation method, seal material, pressure rating, and normal state.
What to verify before purchase
- Verify normal state, port configuration, valve seat/seal material, and pressure rating.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.