Product description
CKD manual diaphragm valve, 1/4-inch VCR, stainless, Cv 0.30 context, Applied Materials 3870-03348.
Specifications and identifiers
valve details
| Valve type | manual diaphragm valve Repeated evidence identifies manual diaphragm valve. |
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| Vendor | CKD Evidence identifies CKD. |
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| Fitting | 1/4-inch VCR Repeated in evidence. |
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| Material | stainless / stainless steel Evidence describes stainless. |
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| Cv | 0.30 Evidence states Cv=0.30; verify on valve label. |
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Applications
gas panelsvacuum isolationslit-valve doorshigh-purity gas deliveryhigh-purity gas manual shutoff/controlgas panel valve replacement
How it works
A valve assembly controls gas, vacuum, coolant, or chamber isolation flow paths in semiconductor equipment.
Port size, actuation method, seal material, pressure rating, and cleanliness class are critical for safe fit and process compatibility.
Technical guide
Viton
Viton is a fluoroelastomer seal material; exact compound and compatibility should be verified.
stainless steel
Stainless steel is common for high-purity gas and vacuum valves.
diaphragm valve
A valve type that isolates the process stream from actuator mechanisms using a flexible diaphragm.
slit valve
A chamber access valve used to isolate wafer-transfer openings.
- Cv
- Flow coefficient.
- NC
- Normally closed.
- VCR
- High-purity face-seal fitting style.
What to verify before purchase
- Verify CKD model, VCR gender/orientation, Cv, material, cleanliness, and pressure rating.
Confirm with the seller
- Exact tool configuration compatibility is not confirmed beyond the evidence provided.
- Current functional condition is not established by part identity alone.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.