Product description
Applied Materials 3930-01042 temperature control box / power supply temperature box associated with Leybold temperature controller 859.20 / 85920 context.
Specifications and identifiers
identification
| Supplier/context | Leybold temperature controller 859.20 / 85920 appears in evidence |
|---|
| Function | Temperature control box / temperature power-supply box |
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| Reported tool context | Etch and turbo pump temperature-box wording appears; verify application |
|---|
Applications
tool interlocksprocess monitoringcooling and facility utility monitoringwafer handling sensorsTemperature control for pump or etch subsystemController box replacementTool thermal monitoring/control
How it works
A sensor or monitoring device used to detect position, pressure, flow, temperature, or other tool conditions.
Sensor range, output type, setpoint, and connector style must match the controller and safety logic.
Technical guide
transducer
device that converts a physical condition into an electrical signal
What to verify before purchase
- Verify Leybold model marking and input voltage
- Confirm controller configuration and setpoints
- Check whether use is pump temperature or etch temperature control
Confirm with the seller
- Exact controlled subsystem is not fully resolved
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.