| Description | RF generator rack / RF cart |
|---|---|
| Revision | Rev A appears in evidence |
| Associated components | MKS/ENI B-8502, ENI Spectrum 11002, LVF3527A, and LVF3560A appear in evidence |
A power source used to generate RF energy for plasma processing.
Frequency, output power, match interface, cooling, and control communication must fit the process tool.
radio-frequency power source for plasma systems
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.
No public documents were listed for this part when captured.
Prices and availability may change. Confirm details with the seller.
Observed public listing price, not an accepted sale amount.
eBay response captured — Checked Oct 8, 2026 16:08 UTC
Availability has not been rechecked; current availability is unknown.
Best Offer · Buy It Now
View on eBay0 matching listings.
No active-status direct listings are shown on this page.
Auction listing history. Direct marketplace listings are shown separately.
| Currency | Price basis | Records | Minimum | Maximum | Mean |
|---|---|---|---|---|---|
| USD | Observed public listing prices | 3 | 45857.5000 | 53950.0000 | 50602.500000000000 |
Amounts without an established currency are retained in the history below and excluded from monetary comparisons. Bids, public listing prices and accepted amounts are distinct; no currency conversion is applied.
| Time recorded | Listing | Observation | Public price | Recorded acceptance |
|---|---|---|---|---|
| Aug 17, 2026 16:19 UTC | 575-013640-417 REV A /RF GENERATOR RACK FLEXP-218(F145721PM2)/LAM RESEARCH | Completed listing price | 53950 (currency not captured) | Not established |
| Jun 18, 2026 16:17 UTC | 575-013640-417 REV A /RF GENERATOR RACK FLEXP-218(F145721PM2)/LAM RESEARCH | Completed listing price | 52000 (currency not captured) | Not established |
| Dec 7, 2024 13:58 UTC | 575-013640-417 REV A /RF GENERATOR RACK FLEXP-218(F145721PM2)/LAM RESEARCH | Completed listing price | 65000 (currency not captured) | Not established |
| Mar 30, 2022 16:13 UTC | 575-013640-417 / RF GENERATOR RACK / LAM RESEARCH | Completed listing price | 35000 (currency not captured) | Not established |
| Jan 24, 2019 00:25 UTC | 575-013640-417 REV A / RF GENERATOR RACK / LAM | Completed listing price | 35000 (currency not captured) | Not established |
| Feb 12, 2018 07:13 UTC | Lam Research 575-013640-417 Rev A (ENI SPECTRUM 11002 / MKS LVF3527A / LVF3560A) | Completed listing price | 20000 (currency not captured) | Not established |
| Feb 12, 2018 07:13 UTC | Lam Research 575-013640-417 Rev A (MKS/ENI B-8502 / MKS LVF3527A / MKS LVF3560A) | Completed listing price | 20000 (currency not captured) | Not established |
| May 30, 2017 23:18 UTC | Lam Research 575-013640-417 Rev A (MKS/ENI B-8502 / MKS LVF3527A / MKS LVF3560A) | Completed listing price | 20000 (currency not captured) | Not established |
| May 30, 2017 23:18 UTC | Lam Research 575-013640-417 Rev A (ENI SPECTRUM 11002 / MKS LVF3527A / LVF3560A) | Completed listing price | 20000 (currency not captured) | Not established |
| Apr 3, 2016 05:09 UTC | LAM Research RF Cart 575-013640-417 Rev A / LVF3527A, LVF3560A, SPECTRUM 11002 | Completed listing price | 13000 (currency not captured) | Not established |
| Mar 23, 2016 03:48 UTC | LAM Research RF Cart 575-013640-417 Rev A / LVF3527A, LVF3560A, SPECTRUM 11002 | Completed listing price | 13000 (currency not captured) | Not established |
| Mar 4, 2016 07:18 UTC | LAM Research RF Rack 575-013640-417 Rev A / Free International Shipping | Completed listing price | 13000 (currency not captured) | Not established |
Public listing prices, direct recorded sale prices and recorded accepted Best Offer amounts remain distinct. Quantities are source estimates. No aggregate sales total or average is inferred.
Prices and availability may change. Confirm details with the seller.
Observed public listing price, not an accepted sale amount.
eBay response captured — Checked Aug 30, 2026 16:24 UTC
Availability has not been rechecked; current availability is unknown.
Best Offer · Buy It Now
View on eBayObserved public listing price, not an accepted sale amount.
eBay response captured — Checked Aug 29, 2026 16:04 UTC
Availability has not been rechecked; current availability is unknown.
Best Offer · Buy It Now
View on eBayLegacy public listing price; currency may not have been captured.
Verification lookup unavailable; legacy status shown — Last attempted Aug 13, 2026 16:07 UTC
Availability has not been rechecked; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
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