Lam Research 660-021964-001 AE AZX 10  3155036-006 REFURBISHEDAE AZX10 RF Match Network Advanced Energy 3155036-006A LAM 660-021964-001 Tuner853-021957-011, 660-021964-001, 3144036-006 / 4520i CHAMBER/ LAMLam Research (Advance Energy) AZX 10 Match 3155036-006 660-021964-001 AssemblyLam Research (Advance Energy) AZX 10 Match 3155036-006 660-021964-001 AssemblyLam Research (Advance Energy) AZX 10 Match 3155036-006 660-021964-001 AssemblyLam Research (Advance Energy) AZX 10 Match 3155036-006 660-021964-001 AssemblyLam Research (Advance Energy) AZX 10 Match 3155036-006 660-021964-001 AssemblyLam Research (Advance Energy) AZX 10 Match 3155036-006 660-021964-001 AssemblyLam Research (Advance Energy) AZX 10 Match 3155036-006 660-021964-001 AssemblyLam Research (Advance Energy) AZX 10 Match 3155036-006 660-021964-001 AssemblyLam Research (Advance Energy) AZX 10 Match 3155036-006 660-021964-001 Assembly
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LAM RESEARCH 660-021964-001

Advanced Energy AZX10 RF Match Network

Market Availability & Pricing

Part number660-021964-001
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales6500 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Electrical › RF Power › RF Matching Networks
Advanced Energy AZX10 RF Match Network
LAM RESEARCH660-021964-001RF match network
Product description
Lam Research 660-021964-001 Advanced Energy AZX10 RF match network / tuner assembly, associated with AE 3155036-006 variants.
Specifications and identifiers
identification
Supplier/modelAdvanced Energy AZX10
Related AE part3155036-006 / 3155036-006A
FunctionRF match network / tuner
Applications
RF plasma generationmagnetron sputteringheater and lamp circuitstool power racksRF impedance matchingPlasma source or bias matchingLam RF power subsystem service
How it works

A power supply, RF generator, RF match, or power-control module used to provide controlled energy to a tool subsystem.

Power rating, frequency, voltage range, cooling, interlocks, and interface compatibility are critical for process stability and equipment safety.

Technical guide
RF match network

Impedance matching assembly that reduces reflected RF power

What to verify before purchase
  • Verify frequency and power rating
  • Confirm connector and control interface
  • Check vacuum capacitors, motors, and tune range
Confirm with the seller
  • Exact chamber/tool compatibility is not confirmed

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

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