Product description
Lam Research 660-021964-001 Advanced Energy AZX10 RF match network / tuner assembly, associated with AE 3155036-006 variants.
Specifications and identifiers
identification
| Supplier/model | Advanced Energy AZX10 |
|---|
| Related AE part | 3155036-006 / 3155036-006A |
|---|
| Function | RF match network / tuner |
|---|
Applications
RF plasma generationmagnetron sputteringheater and lamp circuitstool power racksRF impedance matchingPlasma source or bias matchingLam RF power subsystem service
How it works
A power supply, RF generator, RF match, or power-control module used to provide controlled energy to a tool subsystem.
Power rating, frequency, voltage range, cooling, interlocks, and interface compatibility are critical for process stability and equipment safety.
Technical guide
RF match network
Impedance matching assembly that reduces reflected RF power
What to verify before purchase
- Verify frequency and power rating
- Confirm connector and control interface
- Check vacuum capacitors, motors, and tune range
Confirm with the seller
- Exact chamber/tool compatibility is not confirmed
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.