LAM RESEARCH 660-063437-003
Advanced Energy APEX 2013 RF Generator
Market Availability & Pricing
wSemi tracks marketplace activity for LAM RESEARCH 660-063437-003. Current records show 4 active listings and 8 historical observations.
Current availability
4 active
Verified eBay availability
0 verified active
Legacy active records
4 awaiting/retrying verification
Listings tracked
12 tracked
First seen
Jun 26, 2018
Most recent
Apr 24, 2025
Latest sold listing price
$699.00
Nov 7, 2025 · Public eBay listing price; an accepted Best Offer may differ
Advanced Energy APEX 2013 RF Generator
LAM RESEARCH 660-063437-003 RF generator
Product description
Lam Research 660-063437-003 Advanced Energy APEX 2013 RF generator, associated with AE 3156113-024 and reported 2 kW / 208 V context.
Specifications and identifiers
Identification
| Supplier/model | Advanced Energy APEX 2013 |
| Associated AE number | 3156113-024 |
| Reported power/voltage | 2 kW and 208 V appear in evidence; verify nameplate |
Equipment context
- Lam TCP / etch RF subsystem
Applications
RF/plasma power rackslamp and heater drive circuitsimplant or PVD power subsystemsRF plasma generationLam TCP or etch RF power serviceGenerator rack replacement
How it works
An electrical power source, driver, or power-control module used to supply controlled energy to a tool subsystem.
Voltage, current, power rating, control interface, and interlock compatibility are critical for process stability and equipment safety.
Technical guide
RF generator
power source used to energize plasma loads
power supply
regulated electrical supply for a tool subsystem
What to verify before purchase
- Verify frequency, power rating, and input voltage from nameplate
- Confirm communication/interlock interface
- Test RF output and fault history
Confirm with the seller
- Exact frequency and compatible chamber are not confirmed
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.
12 listings tracked
4 active
5 estimated eBay units sold
8 completed
Jun 26, 2018
First Seen
Apr 24, 2025
Most Recent
$3,323.67
Average Observed Price
N/A
Latest Sale Activity
No sales found
Price History (Last 50 Items)
Related Part Numbers
💡 Market Summary
Our comprehensive database contains 12 total listings for part number 660-063437-003 from LAM RESEARCH. Currently, there are 4 active listings available for purchase. Historical data for this part extends back to June 2018, with the most recent activity on April 24, 2025.
Observed listing prices average $3,323.67, ranging from $686.01 to $7,500.00. Market activity shows 8 completed listings, with eBay reporting an estimated 5 units sold. Whether you're looking to buy or sell, this historical data can help you understand current market conditions and pricing trends for this part.
Available Listings
Current and Historical Listings (12 Total)
Affiliate Disclosure: We may earn a commission from qualifying purchases made through eBay or other merchant links on this page, at no extra cost to you.
Available Listings
LAM RESEARCH 660-063437-003 APEX 2013 RF GENERATOR 3156113-024
Listed: Dec 6, 2024
● Active
Legacy record. This active listing has not yet received an enhanced status check.
View Listing →
$4,500.00
LAM RESEARCH APEX 2013 AE 660-063437-003
Listed: Sep 20, 2023
● Active
Legacy record. This active listing has not yet received an enhanced status check.
View Listing →
$3,500.00
LAM RESEARCH 660-063437-003 AE APEX 1513 RF GENERATOR 3156113-024, USED
Listed: May 8, 2020
● Active
Legacy record. This active listing has not yet received an enhanced status check.
View Listing →
$3,500.00
APEX 2013 3156113-024 LAM P/N 660-063437-003
Listed: Jun 26, 2018
● Active
Legacy record. This active listing has not yet received an enhanced status check.
View Listing →
$7,500.00
Historical Market Records
LAM RESEARCH APEX 2013 AE RF GENERATOR MPN 660-063437-003, 3156113-024 Rev A
Start: Jul 31, 2024
End: Nov 7, 2025
Sold: 1
Completed
$699.00
APEX 2013 AE RF Generator MPN 660-063437-003, 3156113-024 RevA LAM Research
Start: Apr 24, 2025
End: Apr 25, 2025
Sold: 1
Completed
$699.00
AE 2kW APEX 2013 RF Generator Advanced Energy 3156113-024 LAM TCP 660-063437-003
Start: Mar 28, 2019
End: Mar 27, 2025
Sold: 1
Completed
$3,800.00
LAM RESEARCH 660-063437-003 APEX 2013 RF GENERATOR 3156113-024
Start: Apr 12, 2023
End: Dec 6, 2024
Sold: 0
Completed
$4,500.00
LAM RESEARCH APEX 2013 AE RF GENERATOR MPN 660-063437-003 D, 3156113-024
Start: Sep 7, 2023
End: Aug 7, 2024
Sold: 1
Completed
$1,000.00
LAM RESEARCH 660-063437-003 APEX 2013 RF GENERATOR 3156113-024
Start: Feb 7, 2023
End: Apr 7, 2023
Sold: 0
Completed
$4,500.00
LAM RESEARCH 660-063437-003 ADVANCED ENERGY APEX 2013 RF GENERATOR 208V
Start: Nov 9, 2022
End: Nov 16, 2022
Sold: 1
Completed
$686.01
LAM RESEARCH 660-063437-003 ADVANCED ENERGY APEX 2013 RF GENERATOR 208V
Start: Aug 2, 2022
End: Nov 9, 2022
Sold: 0
Completed
$5,000.00
Additional marketplace search
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