LAM RESEARCH 660-063437-003 APEX 2013 RF GENERATOR 3156113-024LAM RESEARCH 660-063437-003 AE APEX 1513 RF GENERATOR 3156113-024, USEDLAM RESEARCH APEX 2013 AE 660-063437-003APEX 2013  3156113-024 LAM P/N 660-063437-003LAM RESEARCH APEX 2013 AE RF GENERATOR MPN 660-063437-003,  3156113-024 Rev AAPEX 2013 AE RF Generator MPN 660-063437-003, 3156113-024 RevA LAM ResearchAE 2kW APEX 2013 RF Generator Advanced Energy 3156113-024 LAM TCP 660-063437-003LAM RESEARCH 660-063437-003 APEX 2013 RF GENERATOR 3156113-024LAM RESEARCH APEX 2013 AE RF GENERATOR MPN 660-063437-003 D, 3156113-024LAM RESEARCH 660-063437-003 APEX 2013 RF GENERATOR 3156113-024LAM RESEARCH 660-063437-003 ADVANCED ENERGY APEX 2013 RF GENERATOR 208VLAM RESEARCH 660-063437-003 ADVANCED ENERGY APEX 2013 RF GENERATOR 208V
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LAM RESEARCH 660-063437-003

Advanced Energy APEX 2013 RF Generator

Market Availability & Pricing

Part number660-063437-003
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales699 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Electrical › RF Power › RF Generators
Advanced Energy APEX 2013 RF Generator
LAM RESEARCH660-063437-003RF generator
Product description
Lam Research 660-063437-003 Advanced Energy APEX 2013 RF generator, associated with AE 3156113-024 and reported 2 kW / 208 V context.
Specifications and identifiers
identification
Supplier/modelAdvanced Energy APEX 2013
Associated AE number3156113-024
Reported power/voltage2 kW and 208 V appear in evidence; verify nameplate
Equipment context
  • Lam TCP / etch RF subsystem
Applications
RF/plasma power rackslamp and heater drive circuitsimplant or PVD power subsystemsRF plasma generationLam TCP or etch RF power serviceGenerator rack replacement
How it works

An electrical power source, driver, or power-control module used to supply controlled energy to a tool subsystem.

Voltage, current, power rating, control interface, and interlock compatibility are critical for process stability and equipment safety.

Technical guide
RF generator

power source used to energize plasma loads

power supply

regulated electrical supply for a tool subsystem

What to verify before purchase
  • Verify frequency, power rating, and input voltage from nameplate
  • Confirm communication/interlock interface
  • Test RF output and fault history
Confirm with the seller
  • Exact frequency and compatible chamber are not confirmed

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

LAM RESEARCH 660-063437-003 APEX 2013 RF GENERATOR 3156113-024

LAM RESEARCH 660-063437-003 APEX 2013 RF GENERATOR 3156113-024

USD 4500.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: Dec 6, 2024 04:32 UTC
End recorded: Dec 7, 2024 04:43 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 10, 2026 16:00 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
LAM RESEARCH 660-063437-003 AE APEX 1513 RF GENERATOR 3156113-024, USED

LAM RESEARCH 660-063437-003 AE APEX 1513 RF GENERATOR 3156113-024, USED

USD 3500.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: May 8, 2020 10:35 UTC
End recorded: Dec 7, 2024 09:59 UTC
Estimated remaining at check: 3
Estimated sold at check: 1

eBay response captured — Checked Oct 20, 2026 16:15 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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