Product description
Lam Research 660-063437-003 Advanced Energy APEX 2013 RF generator, associated with AE 3156113-024 and reported 2 kW / 208 V context.
Specifications and identifiers
identification
| Supplier/model | Advanced Energy APEX 2013 |
|---|
| Associated AE number | 3156113-024 |
|---|
| Reported power/voltage | 2 kW and 208 V appear in evidence; verify nameplate |
|---|
Equipment context
- Lam TCP / etch RF subsystem
Applications
RF/plasma power rackslamp and heater drive circuitsimplant or PVD power subsystemsRF plasma generationLam TCP or etch RF power serviceGenerator rack replacement
How it works
An electrical power source, driver, or power-control module used to supply controlled energy to a tool subsystem.
Voltage, current, power rating, control interface, and interlock compatibility are critical for process stability and equipment safety.
Technical guide
RF generator
power source used to energize plasma loads
power supply
regulated electrical supply for a tool subsystem
What to verify before purchase
- Verify frequency, power rating, and input voltage from nameplate
- Confirm communication/interlock interface
- Test RF output and fault history
Confirm with the seller
- Exact frequency and compatible chamber are not confirmed
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.