ADVANCED ENERGY RF Match  M/N 3150321-000 Lam P/N 660-101818-002 (As-Is)AE Advanced Energy 660-101818-002 3150321-000 Generator, same day ship,Fedex/UPSAE Advanced Energy RF Matching Network 3150321-000 B, 660-101818-002 AE Advanced Energy RF Matching Network 3150321-000 B, 660-101818-002 AE Advanced Energy RF Matching Network 3150321-000 B, 660-101818-002 AE Advanced Energy RF Matching Network 3150321-000 B, 660-101818-002 AE Advanced Energy RF Matching Network 3150321-000 B, 660-101818-002 AE Advanced Energy RF Matching Network 3150321-000 B, 660-101818-002 AE Advanced Energy RF Matching Network 3150321-000 B, 660-101818-002 AE Advanced Energy RF Matching Network 3150321-000 B, 660-101818-002
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ADVANCED ENERGY 660-101818-002

Advanced Energy RF Matching Network

Market Availability & Pricing

Part number660-101818-002
ManufacturerADVANCED ENERGY
Current availabilitySee listings below
Latest completed listing with reported sales799 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Electrical › RF Power › RF Matching & Generators
Advanced Energy RF Matching Network
ADVANCED ENERGY660-101818-002RF matching network
Product description
Advanced Energy RF matching network, model/reference 3150321-000, mapped to Lam part 660-101818-002.
Specifications and identifiers
identified features
VendorAdvanced Energy
FunctionRF match / matching network
Model/reference3150321-000
OEM mappingLam 660-101818-002
Applications
plasma etchPVD and CVD RF deliveryimpedance matching networksRF impedance matchingPlasma chamber RF delivery
How it works

An RF matching network or RF power component is used in plasma systems to deliver or condition RF energy.

RF parts are highly configuration-specific; frequency, power rating, impedance, and connector configuration must match the chamber design.

What to verify before purchase
  • Verify frequency, power rating, connector type, tuning motors, and Lam mapping.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

ADVANCED ENERGY RF Match  M/N 3150321-000 Lam P/N 660-101818-002 (As-Is)

ADVANCED ENERGY RF Match M/N 3150321-000 Lam P/N 660-101818-002 (As-Is)

USD 4615.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: Mar 17, 2024 04:04 UTC
End recorded: Dec 7, 2024 06:52 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:23 UTC

Availability has not been rechecked; current availability is unknown.

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