Product description
Advanced Energy RF matching network, model/reference 3150321-000, mapped to Lam part 660-101818-002.
Specifications and identifiers
identified features
| Vendor | Advanced Energy |
|---|
| Function | RF match / matching network |
|---|
| Model/reference | 3150321-000 |
|---|
| OEM mapping | Lam 660-101818-002 |
|---|
Applications
plasma etchPVD and CVD RF deliveryimpedance matching networksRF impedance matchingPlasma chamber RF delivery
How it works
An RF matching network or RF power component is used in plasma systems to deliver or condition RF energy.
RF parts are highly configuration-specific; frequency, power rating, impedance, and connector configuration must match the chamber design.
What to verify before purchase
- Verify frequency, power rating, connector type, tuning motors, and Lam mapping.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.