SEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartSEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartSEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartSEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartSEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartSEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartSEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartSEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartSEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartSEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartSEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartSEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartSEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartSEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartSEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartSEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartSEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartSEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartSEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartSEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartSEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartSEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartSEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartLam Research 706-013402-003 Rev. E Hot Edge COV Quartz Ring Semiconductor PartSEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartLam Research 706-013402-003 Rev. E Hot Edge COV Quartz Ring Semiconductor PartSEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartLam Research 706-013402-003 Rev. E Hot Edge COV Quartz Ring Semiconductor PartSEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartLam Research 706-013402-003 Rev. E Hot Edge COV Quartz Ring Semiconductor PartSEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartLam Research 706-013402-003 Rev. E Hot Edge COV Quartz Ring Semiconductor PartSEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartLam Research 706-013402-003 Rev. E Hot Edge COV Quartz Ring Semiconductor PartSEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartLam Research 706-013402-003 Rev. E Hot Edge COV Quartz Ring Semiconductor PartSEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartLam Research 706-013402-003 Rev. E Hot Edge COV Quartz Ring Semiconductor PartSEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartLam Research 706-013402-003 Rev. E Hot Edge COV Quartz Ring Semiconductor PartSEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartLam Research 706-013402-003 Rev. E Hot Edge COV Quartz Ring Semiconductor PartSEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartLam Research 706-013402-003 Rev. E Hot Edge COV Quartz Ring Semiconductor PartSEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartLam Research 706-013402-003 Rev. E Hot Edge COV Quartz Ring Semiconductor PartSEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartLam Research 706-013402-003 Rev. E Hot Edge COV Quartz Ring Semiconductor PartSEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartLam Research 706-013402-003 Rev. E Hot Edge COV Quartz Ring Semiconductor PartLam Research 706-013402-003 Rev. E Hot Edge COV Quartz Ring Semiconductor PartSEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartLam Research 706-013402-003 Rev. E Hot Edge COV Quartz Ring Semiconductor PartSEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartLam Research 706-013402-003 Rev. E Hot Edge COV Quartz Ring Semiconductor PartSEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartLam Research 706-013402-003 Rev. E Hot Edge COV Quartz Ring Semiconductor PartSEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartLam Research 706-013402-003 Rev. E Hot Edge COV Quartz Ring Semiconductor PartSEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartLam Research 706-013402-003 Rev. E Hot Edge COV Quartz Ring Semiconductor PartSEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartLam Research 706-013402-003 Rev. E Hot Edge COV Quartz Ring Semiconductor PartSEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartLam Research 706-013402-003 Rev. E Hot Edge COV Quartz Ring Semiconductor PartSEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartLam Research 706-013402-003 Rev. E Hot Edge COV Quartz Ring Semiconductor PartSEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartLam Research 706-013402-003 Rev. E Hot Edge COV Quartz Ring Semiconductor PartSEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartLam Research 706-013402-003 Rev. E Hot Edge COV Quartz Ring Semiconductor PartLam Research 706-013402-003 Rev. E Hot Edge COV Quartz Ring Semiconductor PartSEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartLam Research 706-013402-003 Rev. E Hot Edge COV Quartz Ring Semiconductor PartSEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartLam Research 706-013402-003 Rev. E Hot Edge COV Quartz Ring Semiconductor PartSEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartLam Research 706-013402-003 Rev. E Hot Edge COV Quartz Ring Semiconductor PartSEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartLam Research 706-013402-003 Rev. E Hot Edge COV Quartz Ring Semiconductor PartSEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartLam Research 706-013402-003 Rev. E Hot Edge COV Quartz Ring Semiconductor PartSEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartLam Research 706-013402-003 Rev. E Hot Edge COV Quartz Ring Semiconductor PartSEALED Lam Research 706-013402-003 Rev D Hot Edge Quartz Ring Semiconductor PartLam Research 706-013402-003 Rev. E Hot Edge COV Quartz Ring Semiconductor Part
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LAM RESEARCH 706-013402-003

Hot Edge Quartz Ring

Market Availability & Pricing

Part number706-013402-003
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported salesNo qualifying listing found
Mechanical › Chamber Components › Ceramic & Quartz Parts
Hot Edge Quartz Ring
LAM RESEARCH706-013402-003Quartz hot edge ring
Product description
Hot edge COV quartz ring, Rev. D/E context
Specifications and identifiers
observed
DescriptionHot Edge Quartz Ring / Hot Edge COV Quartz Ring
Both titles support quartz ring identity.
RevisionRev. D / Rev. E
Revision differs between listings; verify required revision.
Applications
Lam chamber hardwareQuartz process ringsWafer edge/hot edge componentsQuartz ring replacementHot edge chamber component
How it works

A quartz hot-edge ring is a chamber ring used near a wafer/process edge in a thermal or plasma environment.

Thermal/process-exposed rings require exact dimensions, material grade, revision and condition.

What to verify before purchase
  • Confirm revision, markings, connector configuration, and compatibility with the exact tool BOM.
  • Verify tested/refurbished/used condition.
Confirm with the seller
  • Exact tool model
  • Revision interchangeability
  • Dimensions

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

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