Product description
Lam Research confinement ring made from or described as Vespel material.
Specifications and identifiers
chamber hardware
| Item noun | Confinement ring Repeated identity. |
|---|
| Material | Vespel Repeated material description. |
|---|
| Manufacturer | Lam Research Request manufacturer and sources align. |
|---|
Applications
etch and deposition process chambersESC and cathode surrounding hardwareconsumable chamber hardware replacementplasma confinement hardwareetch chamber ring replacement
How it works
A chamber ring is a shaped process-area component used around wafers, electrodes, shields, or chamber openings.
Rings influence plasma confinement, edge exclusion, process uniformity, and protection of more expensive chamber hardware.
Technical guide
Vespel
High-performance polyimide used in some confinement or insulating ring applications.
quartz
High-purity ceramic material often used where thermal and plasma compatibility are important.
tantalum/titanium
Metals used in PVD-related chamber hardware when process compatibility requires them.
What to verify before purchase
- Verify Vespel material, revision, and exact chamber family.
- Inspect used polymer rings for deformation, wear, or thermal damage.
Confirm with the seller
- Exact tool configuration and compatibility are not confirmed beyond the part identity.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.