C3456 LAM RESEARCH RING, CONFINEMENT (VESPEL) (NEW) 713-028487-00114739 LAM RESEARCH RING, CONFINEMENT, VESPEL 713-028487-001Lam Research Ring Confinement, Vespel PN 713-028487-001713-028487-001 / RING CONFINEMENT / LAM RESEARCH LAM RESEARCH RING, CONFINEMENT, VESPEL 713-028487-001Lam Research 713-028487-001 B Ring New, Never UsedLAM, 713-028487-001, Confindment Vespel RingLAM  RING CONFINEMNT  (VESPEL)  p/n: 713-028487-001LAM RESEARCH (LAM) 713-028487-001 Vespel Ring, Confinement4520 LAM RESEARCH RING, CONFINEMENT, VESPEL 713-028487-001
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LAM RESEARCH 713-028487-001

Vespel Confinement Ring

Market Availability & Pricing

Part number713-028487-001
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales1075 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › Confinement Rings
Vespel Confinement Ring
LAM RESEARCH713-028487-001confinement ring
Product description
Lam Research confinement ring made from or described as Vespel material.
Specifications and identifiers
chamber hardware
Item nounConfinement ring
Repeated identity.
MaterialVespel
Repeated material description.
ManufacturerLam Research
Request manufacturer and sources align.
Applications
etch and deposition process chambersESC and cathode surrounding hardwareconsumable chamber hardware replacementplasma confinement hardwareetch chamber ring replacement
How it works

A chamber ring is a shaped process-area component used around wafers, electrodes, shields, or chamber openings.

Rings influence plasma confinement, edge exclusion, process uniformity, and protection of more expensive chamber hardware.

Technical guide
Vespel

High-performance polyimide used in some confinement or insulating ring applications.

quartz

High-purity ceramic material often used where thermal and plasma compatibility are important.

tantalum/titanium

Metals used in PVD-related chamber hardware when process compatibility requires them.

What to verify before purchase
  • Verify Vespel material, revision, and exact chamber family.
  • Inspect used polymer rings for deformation, wear, or thermal damage.
Confirm with the seller
  • Exact tool configuration and compatibility are not confirmed beyond the part identity.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

C3456 LAM RESEARCH RING, CONFINEMENT (VESPEL) (NEW) 713-028487-001

C3456 LAM RESEARCH RING, CONFINEMENT (VESPEL) (NEW) 713-028487-001

USD 1050.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: NEW
Listed: Mar 8, 2024 06:01 UTC
End recorded: Dec 7, 2024 13:26 UTC
Estimated remaining at check: 3
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:20 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
14739 LAM RESEARCH RING, CONFINEMENT, VESPEL 713-028487-001

14739 LAM RESEARCH RING, CONFINEMENT, VESPEL 713-028487-001

USD 1017.6900

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: Jul 31, 2019 09:48 UTC
End recorded: Dec 7, 2024 07:17 UTC
Estimated remaining at check: 1
Estimated sold at check: 1

eBay response captured — Checked Oct 20, 2026 16:00 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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