714-801511-002 / CHAMBER LINER, NECK 300MM / LAM RESEARCH CORPORATION9317 LAM RESEARCH ESC LINER 714-801511-00232983 LAM RESEARCH LINER, MTG PL,ESC, 300MM (PARTS) 714-801511-00232983 LAM RESEARCH LINER, MTG PL,ESC, 300MM (PARTS) 714-801511-0029317 LAM RESEARCH ESC LINER 714-801511-002LAM RESEARCH 714-801511-002 LINER, MTNG PLATE, ESC 300MM, USED, EXCELLENT COND.LAM RESEARCH LINER MTG PL ESC 300MM 714-801511-0029317 LAM RESEARCH ESC LINER 714-801511-002Lam Research 714-801511-002 Liner Mfg Plate/ACME GDPLAM RESEARCH 714-801511-002 LINER, MTNG PLATE, ESC 300MM, USED, EXCELLENT COND.LAM RESEARCH 714-801511-002 LINER, MTNG PLATE, ESC 300MM, USED, EXCELLENT COND.LAM RESEARCH 714-801511-002 LINER, MTNG PLATE, ESC 300MM, USED, EXCELLENT COND.LAM RESEARCH 714-801511-002 LINER, MTNG PLATE, ESC 300MM, USED, EXCELLENT COND.LAM RESEARCH 714-801511-002 LINER, MTNG PLATE, ESC 300MM, USED, EXCELLENT COND.LAM RESEARCH 714-801511-002 LINER, MTNG PLATE, ESC 300MM, USED, EXCELLENT COND.LAM RESEARCH 714-801511-002 LINER, MTNG PLATE, ESC 300MM, USED, EXCELLENT COND.LAM RESEARCH 714-801511-002 LINER, MTNG PLATE, ESC 300MM, USED, EXCELLENT COND.LAM RESEARCH 714-801511-002 LINER, MTNG PLATE, ESC 300MM, USED, EXCELLENT COND.LAM RESEARCH 714-801511-002 LINER, MTNG PLATE, ESC 300MM, USED, EXCELLENT COND.LAM 714-801511-002 LINER, NECK 300MMLAM 714-801511-002 LINER, NECK 300MMLAM RESEARCH 714-801511-002 LINER, NECK 300MM
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LAM RESEARCH 714-801511-002

ESC Mounting Plate Liner, 300 mm

Market Availability & Pricing

Part number714-801511-002
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales175 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › Electrostatic Chucks
ESC Mounting Plate Liner, 300 mm
LAM RESEARCH714-801511-002ESC liner / mounting plate
Product description
Liner / mounting plate for 300 mm ESC
Specifications and identifiers
identification
ManufacturerLAM RESEARCH
Part number714-801511-002
Normalized item typeESC liner / mounting plate
supported characteristics
Evidence-supported phraseLiner / mounting plate for 300 mm ESC
Conservative description derived from repeated part-number-specific evidence.
Key identifying terms300 mm, ESC, liner, mounting plate
Terms repeatedly associated with this part number in the provided evidence.
Equipment context
  • Lam Research tool platform
Applications
Wafer holdingThermal controlProcess chamber pedestal/chuck serviceWafer holdingThermal controlProcess chamber pedestal/chuck service
How it works

A chamber hardware plate or liner associated with a 300 mm electrostatic chuck assembly.

Correct identification helps match the part to the correct subsystem, avoid incompatible substitutes, and focus inspection on the right functional features.

Technical guide
ESC
Electrostatic chuck; a wafer-holding component that uses electrostatic force during semiconductor processing.
What to verify before purchase
  • Verify revision, suffix, and dash-number markings on the physical part.
  • Compare connectors, mounting points, and included subcomponents with the tool requirement.
  • Confirm condition, calibration status if applicable, and whether any mating hardware is included.
Confirm with the seller
  • Exact machine compatibility beyond the evidence-supported platform terms.
  • Full OEM specification, revision interchangeability, and service-life status.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

714-801511-002 / CHAMBER LINER, NECK 300MM / LAM RESEARCH CORPORATION

714-801511-002 / CHAMBER LINER, NECK 300MM / LAM RESEARCH CORPORATION

USD 3880.8900

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Aug 10, 2026 13:41 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 16, 2026 16:27 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
32983 LAM RESEARCH LINER, MTG PL,ESC, 300MM (PARTS) 714-801511-002

32983 LAM RESEARCH LINER, MTG PL,ESC, 300MM (PARTS) 714-801511-002

USD 1665.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: May 8, 2025 04:02 UTC
Estimated remaining at check: 8
Estimated sold at check: 0

eBay response captured — Checked Oct 12, 2026 16:06 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
9317 LAM RESEARCH ESC LINER 714-801511-002

9317 LAM RESEARCH ESC LINER 714-801511-002

USD 3885.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: May 8, 2025 04:02 UTC
Estimated remaining at check: 14
Estimated sold at check: 0

eBay response captured — Checked Oct 12, 2026 16:06 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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