Product description
Lam Research 715-011122-002 plate-bearing mount, also associated with gap-drive rebuild descriptions.
Specifications and identifiers
supported details
| Description | Plate-bearing mount Repeated core description. |
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| Related context | Gap drive rebuild Appears in one assembly/rebuild context. |
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| Associated part | 746-007652-001 Appears as a related assembly in one description. |
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Applications
chamber hardwarewafer handlingvacuum hardwareprocess module maintenanceBearing mount replacement in a motion or gap-drive subsystem.Mechanical rebuild kits where the mount plate part number matches.
How it works
A bearing mount plate used as a fitted mechanical part in a semiconductor process tool or wafer-handling subsystem.
Mechanical chamber parts must match dimensions, mounting features, material/coating, and process exposure requirements.
Technical guide
- Gap drive
- motion subsystem used to adjust spacing/gap in some Lam tools
What to verify before purchase
- Confirm whether the purchase is for the individual plate-bearing mount or a larger gap-drive rebuild assembly.
- Verify plate geometry and hardware count.
Confirm with the seller
- Exact tool compatibility beyond the supported platform or description is not confirmed.
- Condition, calibration state, and service history are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.