715-011202-001 / HOUSING, 90 DEG. LOADLOCK / LAM RESEARCH CORPORATION3352 LAM Research 715-011202-001 Rev. F Arm Chamber3352 LAM Research 715-011202-001 Rev F Arm Chamber3354 LAM Research 715-011202-001 Rev. F Arm Chamber3354 LAM Research 715-011202-001 Rev F Arm Chamber3352 LAM Research 715-011202-001 Rev F Arm ChamberLam Research Harmonic Arm Chamber 715-011202-001 rev F Lam Research Harmonic Arm Chamber 715-011202-001 rev F Lam Research Harmonic Arm Chamber 715-011202-001 rev F Lam Research Harmonic Arm Chamber 715-011202-001 rev F Lam Research Harmonic Arm Chamber 715-011202-001 rev F Lam Research Harmonic Arm Chamber 715-011202-001 rev F Lam Research Harmonic Arm Chamber 715-011202-001 rev F Lam Research Harmonic Arm Chamber 715-011202-001 rev F
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LAM RESEARCH 715-011202-001

Chamber Arm

Market Availability & Pricing

Part number715-011202-001
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales750 (currency not captured) — public listing price; reported sold quantity is not a verified transaction. Recorded acceptance: Accepted price not disclosed
Mechanical › Wafer Handling › Chamber Arms
Chamber Arm
LAM RESEARCH715-011202-001Chamber arm
Product description
Lam chamber arm / harmonic arm, Rev F context.
Specifications and identifiers
supported identity
Item typeArm chamber / harmonic arm chamber
Mechanical arm component for chamber-related motion or positioning.
Revision observedRev F
Repeated revision wording; verify marking.
Applications
process chambersPVD/CVD/etch hardwarewafer-edge controlgas distribution or chamber shieldingChamber arm replacementMotion/mechanical linkage service
How it works

A process-chamber mechanical or consumable component shaped for a specific wafer size, chamber location, or process module.

Geometry, material, coating, cleanliness, and wafer-size compatibility can directly affect plasma behavior, particle control, and fit.

Technical guide
possible

ceramic, quartz, silicon, aluminum, stainless steel, titanium, or coated metals may be used depending on the specific component; only listed materials should be treated as confirmed

CVD
chemical vapor deposition
ESC
electrostatic chuck
HDP-CVD
high-density plasma chemical vapor deposition
PVD
physical vapor deposition
What to verify before purchase
  • Verify arm geometry, revision, and associated drive or linkage.
Confirm with the seller
  • Exact tool configuration and revision compatibility are not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

715-011202-001 / HOUSING, 90 DEG. LOADLOCK / LAM RESEARCH CORPORATION

715-011202-001 / HOUSING, 90 DEG. LOADLOCK / LAM RESEARCH CORPORATION

USD 700.8900

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Sep 11, 2026 17:31 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:06 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

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