Product description
Lam Research anodized aluminum electrode / upper electrode, 8 inch HA wording present.
Specifications and identifiers
chamber hardware
| Item noun | Electrode Repeated identity. |
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| Material/finish | Aluminum anodized / HA Repeated anodized aluminum wording; HA may refer to hard anodized. |
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| Size | 8 inch in one source Size should be verified for specific use. |
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Applications
etch chamber electrodesLam process chambersupper electrode replacementelectrode replacementplasma chamber rebuild
How it works
An anodized aluminum electrode is a chamber component used in plasma-processing hardware.
Electrode material, finish, and geometry affect plasma behavior, cleanliness, and chamber compatibility.
What to verify before purchase
- Verify 8 inch size, anodizing/finish, and exact chamber model.
- Inspect surface condition and erosion.
Confirm with the seller
- Exact tool configuration and compatibility are not confirmed beyond the part identity.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.