LAM Research 715-011531-015 Electrode Aluminum AnodizedLAM RESEARCH 715-011531-015 ELECTRODE ALUMINUMSemiconductor Etching Equipment Lam RESEARCH 715-011531-015 J1003288-12-33-0065Semiconductor Etching Equipment Lam RESEARCH 715-011531-015 J1003288-12-33-0065Semiconductor Etching Equipment Lam RESEARCH 715-011531-015 J1003288-12-33-0065Semiconductor Etching Equipment Lam RESEARCH 715-011531-015 J1003288-12-33-0065LAM Research 715-011531-015 Electrode Aluminum AnodizedLAM Research Anodized Aluminum Electrode  P/N: 715-011531-015Lam Research OnTrak 715-011531-015 - Anodized Electrode Aluminum - NewLAM 715-011531-015 / WIZITLAM Aluminum Electrode 715-011531-015715-011531-015 LAM ELECTRODE, ALUMINIUM
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LAM RESEARCH 715-011531-015

Anodized aluminum electrode

Market Availability & Pricing

Part number715-011531-015
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales279 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › Electrodes
Anodized aluminum electrode
LAM RESEARCH715-011531-015electrode
Product description
Anodized aluminum electrode, Lam Research 715-011531-015
Specifications and identifiers
identification
Item typeElectrode
Conductive chamber or process component.
Material/contextAluminum, anodized
Repeated material description.
Additional referenceJ1003288-12-33-0065 appears in one source
Potential vendor/drawing reference requiring verification.
Applications
Lam Research etch equipmentplasma chamber hardwareelectrode replacementplasma chamber electrode replacementLam etch chamber serviceprocess kit spare
How it works

A chamber electrode is a conductive process component used in plasma or bias-related chamber assemblies.

Electrode material, anodization/coating, geometry, and erosion state are critical for plasma performance and contamination control.

Technical guide
anodized aluminum

Aluminum with an oxide surface treatment; exact anodize specification should be verified.

What to verify before purchase
  • Confirm exact chamber/tool model.
  • Verify anodize/coating specification and revision.
  • Inspect used electrodes for erosion, arc marks, or coating damage.
Confirm with the seller
  • complete chamber compatibility
  • RF/bias role
  • coating specification

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

LAM Research 715-011531-015 Electrode Aluminum Anodized

LAM Research 715-011531-015 Electrode Aluminum Anodized

USD 325.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Jun 25, 2024 00:02 UTC
End recorded: Dec 7, 2024 12:58 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 7, 2026 16:04 UTC

Availability has not been rechecked; current availability is unknown.

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