715-011531-016/ ELECTRODE, ALUMINUM ANODIZED / LAM RESEARCH715-011531-016 | LAM Research 4400 UPPER ELECTRODELAM 715-011531-016, ELECTRODE, ALUMINUM ANODIZED / LAM RESEARCH8770 LAM RESEARCH ELECTRODE ALUMINIUM ANODIZED DEGREASE 715-011531-016715-011531-016/ ELECTRODE, ALUMINUM ANODIZED / LAM RESEARCH715-011531-016/ ELECTRODE, ALUMINUM ANODIZED / LAM RESEARCH715-011531-016/ ELECTRODE, ALUMINUM ANODIZED / LAM RESEARCHLam Research 715-011531-016 Electrode Aluminum Anodized Degrease8770 LAM RESEARCH ELECTRODE ALUMINIUM ANODIZED DEGREASE 715-011531-016LAM 715-011531-016 Aluminum Anodized ElectrodeLAM 715-011531-016 Electrode LRCLam Upper Electrode Anodized 715-011531-016LAM 715-011531-016 Electrode, Aluminum ANODIZED, SealedLAM Electrode, p/n 715-011531-016, CleanedLam Research Anodized Electrode 715-011531-016Lam Research Anodized Electrode 715-011531-016Lam Research Anodized Electrode 715-011531-016Lam Research Anodized Electrode 715-011531-016Lam Research Anodized Electrode 715-011531-016LAM 715-011531-016 Electrode, Aluminum ANODIZED, NEW, SealedOEM Part LAM RESEARCH (LAM) 715-011531-016 Pedastal 8in-200mm AL pinless
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LAM RESEARCH 715-011531-016

Aluminum Anodized Electrode

Market Availability & Pricing

Part number715-011531-016
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales149 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › Electrodes & Cathodes
Aluminum Anodized Electrode
LAM RESEARCH715-011531-016aluminum anodized electrode
Product description
Lam Research 715-011531-016 aluminum anodized electrode, also described as an upper electrode in Lam 4400 context.
Specifications and identifiers
identification
Componentelectrode
Repeatedly supported by provided wording.
Material/finishaluminum, anodized
Repeatedly supported.
Contextupper electrode / Lam 4400 context
Confirm exact chamber/tool fit.
Applications
plasma etch chambersRF electrode assemblieschamber consumablesplasma chamber electrode replacementupper electrode maintenanceLam 4400-style chamber component service
How it works

A conductive process component used in plasma or RF chamber assemblies.

Material, surface treatment, geometry, and cleaning condition affect RF coupling, plasma uniformity, and contamination control.

Technical guide
aluminum_anodized

Anodized aluminum has a controlled oxide surface that can improve wear and corrosion resistance.

plasma_processing

Electrodes help couple RF energy into plasma process regions.

What to verify before purchase
  • Verify whether this is upper electrode, pedestal, or another electrode variant for the target tool.
  • Confirm anodized finish and cleaning status.
  • Check dimensions and revision before installation.
Confirm with the seller
  • One source suggests pedestal wording, so exact sub-assembly role should be verified.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

715-011531-016/ ELECTRODE, ALUMINUM ANODIZED / LAM RESEARCH

715-011531-016/ ELECTRODE, ALUMINUM ANODIZED / LAM RESEARCH

USD 336.8000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Oct 3, 2026 05:52 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 3, 2026 16:00 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
715-011531-016 | LAM Research 4400 UPPER ELECTRODE

715-011531-016 | LAM Research 4400 UPPER ELECTRODE

USD 795.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Jul 1, 2025 20:06 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 12, 2026 16:19 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
LAM 715-011531-016, ELECTRODE, ALUMINUM ANODIZED / LAM RESEARCH

LAM 715-011531-016, ELECTRODE, ALUMINUM ANODIZED / LAM RESEARCH

USD 1110.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Jul 14, 2024 15:32 UTC
End recorded: Dec 7, 2024 02:09 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 7, 2026 16:14 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
8770 LAM RESEARCH ELECTRODE ALUMINIUM ANODIZED DEGREASE 715-011531-016

8770 LAM RESEARCH ELECTRODE ALUMINIUM ANODIZED DEGREASE 715-011531-016

USD 184.1400

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: Jun 2, 2017 09:54 UTC
End recorded: Dec 7, 2024 02:39 UTC
Estimated remaining at check: 30
Estimated sold at check: 0

eBay response captured — Checked Oct 19, 2026 16:02 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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