Product description
Lam Research 715-011531-016 aluminum anodized electrode, also described as an upper electrode in Lam 4400 context.
Specifications and identifiers
identification
| Component | electrode Repeatedly supported by provided wording. |
|---|
| Material/finish | aluminum, anodized Repeatedly supported. |
|---|
| Context | upper electrode / Lam 4400 context Confirm exact chamber/tool fit. |
|---|
Applications
plasma etch chambersRF electrode assemblieschamber consumablesplasma chamber electrode replacementupper electrode maintenanceLam 4400-style chamber component service
How it works
A conductive process component used in plasma or RF chamber assemblies.
Material, surface treatment, geometry, and cleaning condition affect RF coupling, plasma uniformity, and contamination control.
Technical guide
aluminum_anodized
Anodized aluminum has a controlled oxide surface that can improve wear and corrosion resistance.
plasma_processing
Electrodes help couple RF energy into plasma process regions.
What to verify before purchase
- Verify whether this is upper electrode, pedestal, or another electrode variant for the target tool.
- Confirm anodized finish and cleaning status.
- Check dimensions and revision before installation.
Confirm with the seller
- One source suggests pedestal wording, so exact sub-assembly role should be verified.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.