715-011630-001 / ELECTRODE, BOTTOM / LAM RESEARCH CORPORATIONLam Research Electrode, Bottom PN: 715-011630-001LAM Research 4400 715-011630-001 PEDESTAL ESC, 139164LAM Research 4400 715-011630-001 PEDESTAL ESC, 109844USED LAM Research 4400 715-011630-001 PEDESTAL ESCLam Research Electrode, Bottom PN: 715-011630-001 ElectrodeLAM RESEARCH LAM 715-011630-001 Bottom ElectrodeUSED LAM Research 4400 715-011630-001 PEDESTAL ESC FREE SHIPPINGLAM RESEARCH (LAM) 715-011630-001 Bottom ElectrodeRefurbished LAM Research 715-011630-001 Bottom Electrode (CLEANED) 9600Lam 4400, Lower Elc Assy 715-011630-001 Rev. E Used WorkingRefurbished LAM Research 715-011630-001 Bottom Electrode (CLEANED) 9600Refurbished LAM Research 715-011630-001 Bottom Electrode (CLEANED) 9600Refurbished LAM Research 715-011630-001 Bottom Electrode (CLEANED) 9600Refurbished LAM Research 715-011630-001 Bottom Electrode (CLEANED) 9600Refurbished LAM Research 715-011630-001 Bottom Electrode (CLEANED) 9600Refurbished LAM Research 715-011630-001 Bottom Electrode (CLEANED) 9600Refurbished LAM Research 715-011630-001 Bottom Electrode (CLEANED) 9600LAM Research 715-011630-001 Bottom/Lower Electrode 9600 (Refurbished)Refurbished LAM Research 715-011630-001 Bottom Electrode (CLEANED) 9600LAM Research 715-011630-001 Bottom/Lower Electrode 9600 (Refurbished)Refurbished LAM Research 715-011630-001 Bottom Electrode (CLEANED) 9600LAM Research 715-011630-001 Bottom/Lower Electrode 9600 (Refurbished)Refurbished LAM Research 715-011630-001 Bottom Electrode (CLEANED) 9600LAM Research 715-011630-001 Bottom/Lower Electrode 9600 (Refurbished)Refurbished LAM Research 715-011630-001 Bottom Electrode (CLEANED) 9600LAM Research 715-011630-001 Bottom/Lower Electrode 9600 (Refurbished)Refurbished LAM Research 715-011630-001 Bottom Electrode (CLEANED) 9600LAM Research 715-011630-001 Bottom/Lower Electrode 9600 (Refurbished)Refurbished LAM Research 715-011630-001 Bottom Electrode (CLEANED) 9600LAM Research 715-011630-001 Bottom/Lower Electrode 9600 (Refurbished)Refurbished LAM Research 715-011630-001 Bottom Electrode (CLEANED) 9600LAM Research 715-011630-001 Bottom/Lower Electrode 9600 (Refurbished)Refurbished LAM Research 715-011630-001 Bottom Electrode (CLEANED) 9600LAM Research 715-011630-001 Bottom/Lower Electrode 9600 (Refurbished)Refurbished LAM Research 715-011630-001 Bottom Electrode (CLEANED) 9600LAM Research 715-011630-001 Bottom/Lower Electrode 9600 (Refurbished)Refurbished LAM Research 715-011630-001 Bottom Electrode (CLEANED) 9600LAM Research 715-011630-001 Bottom/Lower Electrode 9600 (Refurbished)Refurbished LAM Research 715-011630-001 Bottom Electrode (CLEANED) 9600LAM Research 715-011630-001 Bottom/Lower Electrode 9600 (Refurbished)Refurbished LAM Research 715-011630-001 Bottom Electrode (CLEANED) 9600LAM Research 715-011630-001 Bottom/Lower Electrode 9600 (Refurbished)Refurbished LAM Research 715-011630-001 Bottom Electrode (CLEANED) 9600LAM Research 715-011630-001 Bottom/Lower Electrode 9600 (Refurbished)Refurbished LAM Research 715-011630-001 Bottom Electrode (CLEANED) 9600LAM Research 715-011630-001 Bottom/Lower Electrode 9600 (Refurbished)Refurbished LAM Research 715-011630-001 Bottom Electrode (CLEANED) 9600LAM Research 715-011630-001 Bottom/Lower Electrode 9600 (Refurbished)Refurbished LAM Research 715-011630-001 Bottom Electrode (CLEANED) 9600LAM Research 715-011630-001 Bottom/Lower Electrode 9600 (Refurbished)Refurbished LAM Research 715-011630-001 Bottom Electrode (CLEANED) 9600LAM Research 715-011630-001 Bottom/Lower Electrode 9600 (Refurbished)Refurbished LAM Research 715-011630-001 Bottom Electrode (CLEANED) 9600LAM Research 715-011630-001 Bottom/Lower Electrode 9600 (Refurbished)Refurbished LAM Research 715-011630-001 Bottom Electrode (CLEANED) 9600LAM Research 715-011630-001 Bottom/Lower Electrode 9600 (Refurbished)Refurbished LAM Research 715-011630-001 Bottom Electrode (CLEANED) 9600LAM Research 715-011630-001 Bottom/Lower Electrode 9600 (Refurbished)Refurbished LAM Research 715-011630-001 Bottom Electrode (CLEANED) 9600LAM Research 715-011630-001 Bottom/Lower Electrode 9600 (Refurbished)
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LAM Research 715-011630-001

ESC Pedestal / Electrostatic Chuck

Market Availability & Pricing

LOWER ELECTRODE, 9600

Part number715-011630-001
ManufacturerLAM Research
Current availabilitySee listings below
Latest completed listing with reported sales439.99 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Wafer Handling & Chucks › Electrostatic Chucks
ESC Pedestal / Electrostatic Chuck
LAM Research715-011630-001electrostatic chuck pedestal
Product description
Electrostatic chuck / ESC pedestal, 195 mm notch, 8 inch / 200 mm DPS chamber context.
Specifications and identifiers
chuck details
Chuck typeESC / electrostatic chuck pedestal
A wafer support that uses electrostatic force to hold the wafer.
Wafer size context195 mm / 8 inch / 200 mm appears in evidence
Buyer should confirm exact supported wafer size and notch geometry.
Platform/process contextDPS chamber
Listed evidence repeatedly mentions DPS chamber context.
Equipment context
  • Applied Materials DPS chamber
Applications
Wafer clamping/support in plasma processingEtch chamber pedestal serviceWafer clamping/support in plasma processingEtch chamber pedestal service
How it works

A electrostatic chuck pedestal used as a service/replacement part in semiconductor or industrial equipment.

Correct identification matters because fit, revision, contamination history, and configuration can determine whether the part is usable in a tool.

Technical guide
polyimide_or_ceramic

ESCs may use dielectric layers; evidence mentions polyimide on one title but exact construction should be verified.

DPS
Applied Materials DPS chamber/process context appearing in evidence.
ESC
Electrostatic chuck.
What to verify before purchase
  • Verify exact revision, physical condition, and included accessories before purchase.
  • Confirm compatibility against the tool BOM or OEM part label.
Confirm with the seller
  • Exact OEM compatibility beyond the platforms or contexts appearing in listing evidence is not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

715-011630-001 / ELECTRODE, BOTTOM / LAM RESEARCH CORPORATION

715-011630-001 / ELECTRODE, BOTTOM / LAM RESEARCH CORPORATION

USD 3500.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Sep 24, 2026 20:49 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 17, 2026 16:16 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
Lam Research Electrode, Bottom PN: 715-011630-001

Lam Research Electrode, Bottom PN: 715-011630-001

USD 600.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Sep 11, 2024 16:32 UTC
End recorded: Dec 7, 2024 11:29 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 8, 2026 16:07 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
LAM Research 4400 715-011630-001 PEDESTAL ESC, 139164

LAM Research 4400 715-011630-001 PEDESTAL ESC, 139164

USD 6000.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Dec 8, 2023 17:30 UTC
End recorded: Dec 7, 2024 12:02 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 4, 2026 16:08 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
LAM Research 4400 715-011630-001 PEDESTAL ESC, 109844

LAM Research 4400 715-011630-001 PEDESTAL ESC, 109844

USD 6000.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Sep 15, 2022 17:00 UTC
End recorded: Dec 7, 2024 06:18 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 30, 2026 16:17 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
USED LAM Research 4400 715-011630-001 PEDESTAL ESC

USED LAM Research 4400 715-011630-001 PEDESTAL ESC

USD 3790.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Dec 10, 2018 07:44 UTC
End recorded: Dec 7, 2024 05:00 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 19, 2026 16:16 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay

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