Product description
Lam Research 715-012111-003 cover arm housing with alignment hole, associated with 853-012100-xxx loadlock arm assembly context.
Specifications and identifiers
identification
| Description | Cover, arm housing with alignment hole |
|---|
| Reported assembly context | Loadlock arm assembly 853-012100-xxx |
|---|
Applications
chamber hardwaretool mechanical assembliesservice kitsLoadlock arm housing serviceWafer-handling mechanism coverAlignment-related mechanical cover replacement
How it works
A mechanical part or assembly used for mounting, alignment, shielding, or tool hardware.
Dimensions, material, revision, and surface condition determine compatibility and reliability.
What to verify before purchase
- Verify compatible 853-012100-xxx assembly revision
- Inspect mounting holes and alignment features
- Confirm whether cover only or full arm housing is included
Confirm with the seller
- Exact loadlock arm revision compatibility is not confirmed
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.