Product description
Lam Research 715-021326-008 lower electrode cap for a 3-pin lifter configuration.
Specifications and identifiers
identification
| Description | Cap, lower electrode, 3 pin lifter |
|---|
Applications
wafer handling hardwarechamber fixturesmotion assembliesLower electrode hardware replacement3-pin lifter chamber hardwareLam chamber mechanical service
How it works
A machined or assembled mechanical component used in wafer handling, chamber hardware, or tool motion.
Dimensions, finish, material, and wear condition determine fit and process safety.
What to verify before purchase
- Verify electrode/chamber compatibility
- Inspect surface condition and dimensions
- Confirm revision and lift-pin geometry
Confirm with the seller
- Exact Lam chamber model is not confirmed
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.