Lam Research P/N: 715-028615-002 / Plate, Upper Baffle, 8 inch / (NEW)Lam Research 715-028615-002 8" Upper Baffle Plate NewLam Research 715-028615-002 8" Upper Baffle Plate Used Very GoodLam Research 715-028615-002 8" Upper Baffle Plate New Lam Research 715-028615-002 8" Upper Baffle Plate UsedLam Research 715-028615-002 8" Upper Baffle Plate New Lam Research 715-028615-002 8" Upper Baffle Plate New Lam Research 715-028615-002 8" Upper Baffle Plate UsedLam Research 715-028615-002 8" Upper Baffle Plate UsedLam Research 715-028615-002 8" Upper Baffle Plate New Lam Research 715-028615-002 8" Upper Baffle Plate UsedLam Research 715-028615-002 8" Upper Baffle Plate New Lam Research 715-028615-002 8" Upper Baffle Plate New Lam Research 715-028615-002 8" Upper Baffle Plate New
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LAM RESEARCH 715-028615-002

8 inch Upper Baffle Plate

Market Availability & Pricing

Part number715-028615-002
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported salesNo qualifying listing found
Mechanical › Chamber Components › Baffle Plates
8 inch Upper Baffle Plate
LAM RESEARCH715-028615-002upper baffle plate
Product description
Lam Research 8 inch upper baffle plate.
Specifications and identifiers
identification
Positionupper
Upper baffle plate in the chamber/baffle set.
Nominal size8 inch
Size repeatedly stated in part references.
Applications
etch chambersprocess kitsgas-flow or exhaust regionschamber gas-flow or exhaust baffle hardwareLam chamber process kit service
How it works

A baffle or chamber plate shapes gas flow, pumping conductance, or plasma/chamber exposure.

Baffle and plate geometry can affect process uniformity, particle performance, and chamber pumping behavior.

Technical guide
upper_baffle
A baffle plate positioned above or upstream of a matching lower baffle or chamber region.
What to verify before purchase
  • Verify chamber family, revision, material, and whether a matching lower baffle is required.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

Lam Research P/N: 715-028615-002 / Plate, Upper Baffle, 8 inch / (NEW)

Lam Research P/N: 715-028615-002 / Plate, Upper Baffle, 8 inch / (NEW)

USD 99.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Aug 7, 2017 00:16 UTC
End recorded: Dec 7, 2024 02:49 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 19, 2026 16:04 UTC

Availability has not been rechecked; current availability is unknown.

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