Lam Research 715-036558-001 Industrial 17-3/4"ID ESC Chuck Cam Edge RingLam Research 715-036558-001 Industrial 17-3/4"ID ESC Chuck Cam Edge RingLam Research 715-036558-001 Industrial 17-3/4"ID ESC Chuck Cam Edge RingLam Research 715-036558-001 Industrial 17-3/4"ID ESC Chuck Cam Edge RingLam Research 715-036558-001 Industrial 17-3/4"ID ESC Chuck Cam Edge RingLam Research 715-036558-001 Industrial 17-3/4"ID ESC Chuck Cam Edge RingLam Research 715-036558-001 Industrial 17-3/4"ID ESC Chuck Cam Edge RingLam Research 715-036558-001 Industrial 17-3/4"ID ESC Chuck Cam Edge RingLam Research 715-036558-001 Industrial 17-3/4"ID ESC Chuck Cam Edge RingLam Research 715-036558-001 Industrial 17-3/4"ID ESC Chuck Cam Edge RingLam Research 715-036558-001 Industrial 17-3/4"ID ESC Chuck Cam Edge RingLam Research 715-036558-001 Industrial 17-3/4"ID ESC Chuck Cam Edge RingLam Research 715-036558-001 Rev.A Cam Ring Semiconductor PartLam Research 715-036558-001 Rev.A Cam Ring Semiconductor PartLam Research 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LAM RESEARCH 715-036558-001

ESC Chuck Cam Edge Ring

Market Availability & Pricing

Part number715-036558-001
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported salesNo qualifying listing found
Mechanical › Chamber Components › Ceramic & Quartz Parts
ESC Chuck Cam Edge Ring
LAM RESEARCH715-036558-001Cam edge ring
Product description
17-3/4 inch ID ESC chuck cam edge ring
Specifications and identifiers
observed
Description17-3/4 inch ID ESC chuck cam edge ring
Supported by provided listing title evidence.
Feature/context17-3/4 inch ID
Dimension/context appears in evidence; verify against drawing.
ESC contextESC chuck wafer ring
Evidence places the ring around ESC chuck/wafer hardware.
Equipment context
  • Lam Research ESC chuck/chamber hardware
Applications
ESC chuck ring hardwareWafer edge/focus/guard/shadow functionsLam Research chamber consumablesESC chuck ring replacementWafer edge/process-area chamber hardware
How it works

An ESC chuck wafer ring is a process-area ring used around an electrostatic chuck to manage wafer edge, focus, guarding, shadowing, or insulation functions.

These parts are fit- and material-sensitive; small ID, material, coating, or revision differences can affect process results and hardware clearance.

Technical guide
ESC

Electrostatic chuck; holds the wafer during processing.

ID
Inside diameter.
What to verify before purchase
  • Confirm ID/OD, thickness, material, coating, and revision.
  • Inspect for chips, cracks, erosion, or contamination.
  • Verify exact Lam chamber/tool compatibility.
Confirm with the seller
  • Exact tool/chamber model
  • Full dimensional drawing
  • Coating/surface treatment

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

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