Product description
Lam Research 715-042721-810 chamber liner / inner liner, hi-flow 2300 / Kiyo 45 context.
Specifications and identifiers
details
| Tool family context | Lam 2300 / Kiyo 45 wording appears |
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| Coating/material descriptor | R-Y203 plus SPT wording appears |
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identification
| Normalized item type | Chamber liner |
|---|
| Supported description | Lam Research 715-042721-810 chamber liner / inner liner, hi-flow 2300 / Kiyo 45 context. |
|---|
Equipment context
- Lam Research 2300 / Kiyo chamber context
Applications
gas boxes and chemical deliverycooling-water or helium linesvacuum and process exhaust plumbingEtch chamber liner replacementChamber wall protection and process containment
How it works
A gas, fluid, or vacuum handling component used to direct, regulate, isolate, or connect process media.
Incorrect valve/fitting geometry or rating can cause leaks, flow errors, or unsafe process-gas handling.
Technical guide
stainless_steel
Stainless steel is common in process-gas and vacuum fittings due to corrosion resistance and cleanliness.
- VCR
- A metal-gasket face-seal fitting standard common in high-purity gas delivery.
What to verify before purchase
- Confirm whether target tool requires Kiyo 45 or 2300 hi-flow liner variant.
- Verify coating, clean/repair status, and liner revision.
Confirm with the seller
- Exact machine compatibility beyond the named platform/context is not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.