Product description
Lam Research 2300 symmetric chamber door / door liner assembly, part 715-045710-821.
Specifications and identifiers
Function
| Likely role | Mechanical chamber door or liner component for chamber access/sealing area |
|---|
Identity
| Supported item noun | Door, symmetric chamber / chamber door assembly |
|---|
| Platform/context | 2300 |
|---|
| Alternate wording | Door liner appears in one source |
|---|
Applications
PVD/CVD/etch process chamberschamber rebuildsconsumable kitstool refurbishmentchamber door replacementdoor liner serviceLam 2300 chamber maintenance
How it works
A mechanical chamber or process-area component used near the wafer, plasma, gas flow, or vacuum boundary of a semiconductor tool.
Geometry, coating, material, and revision can affect process uniformity, particle control, sealing, and compatibility with nearby assemblies.
What to verify before purchase
- Confirm whether the required item is the full door assembly or only the liner
- Verify revision and seal interface condition
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.