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LAM RESEARCH 715-069719-001

ESC Chuck Insert Ring

Market Availability & Pricing

Part number715-069719-001
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported salesNo qualifying listing found
Mechanical › Chamber Components › Process Rings & Inserts
ESC Chuck Insert Ring
LAM RESEARCH715-069719-001ESC chuck insert ring
Product description
Industrial 11-5/8 inch ID ESC chuck insert ring / semiconductor ring
Specifications and identifiers
observed evidence
DescriptionESC chuck insert ring / ring semiconductor part
Evidence supports ring identity.
Dimension11-5/8 inch ID appears in evidence
Verify dimension on part.
RevisionRev. A appears in evidence
Confirm revision requirements.
Applications
ESC chuck wafer insert rings200mm chamber hardwareQuartz process ringsESC chuck insert ring replacement
How it works

A quartz ring or insert ring is a process-exposed chamber/chuck ring used around the wafer or ESC area.

Quartz ring dimensions, ID, revision, and chamber/ESC compatibility are critical.

Technical guide
quartz

High-purity silica material used for clean, heat-resistant chamber parts.

ESC

Electrostatic chuck.

ID
Inside diameter.
What to verify before purchase
  • Confirm exact revision and configuration from the unit label.
  • Verify compatibility against the tool BOM or removed part.
  • Check tested/refurbished/used condition before purchase.
Confirm with the seller
  • Exact machine compatibility
  • Revision interchangeability
  • Full electrical/mechanical specifications

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

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