41066 LAM RESEARCH ELECTROSTATIC CHUCK, 715-102001-048/A 839-800327-562 REV D30073 LAM RESEARCH ELECTROSTATIC CHUCK 715-102001-04829357 LAM RESEARCH ELECTROSTATIC CHUCK, 715-102001-048 (PARTS) 839-800327-52629358 LAM RESEARCH ELECTROSTATIC CHUCK, 715-102001-048 719-102001-55430695 LAM RESEARCH ELECTROSTATIC CHUCK, 719-102001-048 715-102001-04830073 LAM RESEARCH ELECTROSTATIC CHUCK 715-102001-04826078 LAM RESEARCH ELECTROSTATIC CHUCK, 719-102001-048 (PARTS) 715-102001-04828725 LAM RESEARCH ELECTROSTATIC CHUCK, 839-800327-562 (PARTS) 715-102001-04825616 LAM RESEARCH ELECTROSTATIC CHUCK, 719-102001-554 (PARTS) 715-102001-04826080 LAM RESEARCH ELECTROSTATIC CHUCK, 719-102001-048 715-102001-04826079 LAM RESEARCH ELECTROSTATIC CHUCK, 839-800327-562 715-102001-04826081 LAM RESEARCH ELECTROSTATIC CHUCK, 719-102001-554 715-102001-048
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LAM RESEARCH 715-102001-048

Electrostatic chuck

Market Availability & Pricing

Part number715-102001-048
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported salesNo qualifying listing found
Mechanical › Chamber Components › Electrostatic Chucks
Electrostatic chuck
LAM RESEARCH715-102001-048electrostatic chuck
Product description
Lam Research electrostatic chuck associated with 715-102001-048 and related 719/839 cross-reference numbers.
Specifications and identifiers
identification
ComponentElectrostatic chuck
Wafer-holding chuck used to clamp a wafer electrostatically during processing.
Related numbers719-102001-048, 719-102001-554, 839-800327-562, 839-800327-526
Associated numbers appear with the same component context; verify actual supersession/cross-reference before use.
Related parts
Applications
plasma etch chambersCVD/PVD process moduleswafer temperature and clamping controlwafer clampingprocess chamber refurbishmentelectrostatic chuck replacement
How it works

A process-chamber component that uses electrostatic force to hold the wafer during processing.

ESCs are highly configuration-specific and affect wafer clamping, temperature control, backside gas sealing, and process uniformity.

Technical guide
ESC

Electrostatic chuck, a wafer-clamping component used in many plasma process tools.

What to verify before purchase
  • Verify chamber model, wafer size, heater/cooling configuration, and revision.
  • Confirm any related 719/839 numbers as cross-references, not separate parts.
Confirm with the seller
  • Exact chamber compatibility, wafer size, and ESC electrical specs are not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

No image available

30692 LAM RESEARCH ELECTROSTATIC CHUCK, 715-102001-048 839-800327-526

USD 15000.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: Aug 20, 2026 09:52 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 17, 2026 16:02 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
41066 LAM RESEARCH ELECTROSTATIC CHUCK, 715-102001-048/A 839-800327-562 REV D

41066 LAM RESEARCH ELECTROSTATIC CHUCK, 715-102001-048/A 839-800327-562 REV D

USD 12800.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: Jun 30, 2026 09:13 UTC
Estimated remaining at check: 2
Estimated sold at check: 0

eBay response captured — Checked Oct 16, 2026 16:08 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
29358 LAM RESEARCH ELECTROSTATIC CHUCK, 715-102001-048 719-102001-554

29358 LAM RESEARCH ELECTROSTATIC CHUCK, 715-102001-048 719-102001-554

USD 11100.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: May 8, 2025 04:02 UTC
Estimated remaining at check: 5
Estimated sold at check: 0

eBay response captured — Checked Oct 12, 2026 16:06 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
29357 LAM RESEARCH ELECTROSTATIC CHUCK, 715-102001-048 (PARTS) 839-800327-526

29357 LAM RESEARCH ELECTROSTATIC CHUCK, 715-102001-048 (PARTS) 839-800327-526

USD 7770.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: May 8, 2025 04:02 UTC
Estimated remaining at check: 2
Estimated sold at check: 0

eBay response captured — Checked Oct 12, 2026 16:06 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
30073 LAM RESEARCH ELECTROSTATIC CHUCK 715-102001-048

30073 LAM RESEARCH ELECTROSTATIC CHUCK 715-102001-048

USD 11100.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: May 8, 2025 04:02 UTC
Estimated remaining at check: 2
Estimated sold at check: 0

eBay response captured — Checked Oct 12, 2026 16:06 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
30695 LAM RESEARCH ELECTROSTATIC CHUCK, 719-102001-048 715-102001-048

30695 LAM RESEARCH ELECTROSTATIC CHUCK, 719-102001-048 715-102001-048

USD 12332.1000

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: Nov 22, 2022 03:30 UTC
End recorded: Dec 6, 2024 17:45 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:01 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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