Product description
Clamp ring for upper electrode, Lam Research part 715-140287-003.
Specifications and identifiers
Function
| Likely role | Mechanical ring used to clamp or retain upper electrode hardware |
|---|
Identity
| Supported item noun | Ring clamp upper electrode |
|---|
| Assembly context | Upper electrode |
|---|
| Manufacturer | Lam Research |
|---|
Applications
PVD/CVD/etch process chamberschamber rebuildsconsumable kitstool refurbishmentupper electrode serviceetch chamber rebuildclamp ring replacement
How it works
A mechanical chamber or process-area component used near the wafer, plasma, gas flow, or vacuum boundary of a semiconductor tool.
Geometry, coating, material, and revision can affect process uniformity, particle control, sealing, and compatibility with nearby assemblies.
What to verify before purchase
- Confirm electrode/chamber model and revision
- Verify material, coating, and wear condition
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.