Product description
Lam Research 715-140421-028 electrode, aluminum anodized, 8 in context.
Specifications and identifiers
supported details
| Component | Electrode Supported by all supplied descriptions. |
|---|
| Material/finish | Aluminum, anodized Supported by repeated title wording. |
|---|
| Size | 8 in Supported by repeated title wording. |
|---|
Applications
plasma chamber electrode replacementprocess kit maintenanceRF chamber hardwareLam plasma chamber electrode replacement8 in chamber process kit service
How it works
An electrode is a conductive chamber component used in plasma generation or wafer biasing.
Material, anodizing, surface condition, and geometry affect plasma behavior and particle performance.
Technical guide
aluminum_anodized
Aluminum with anodized surface treatment for electrical/chemical surface properties.
- 8_in
- Likely chamber/wafer-size context; verify against drawing.
What to verify before purchase
- Verify exact electrode position, anodize condition, revision, and chamber model.
- Inspect for erosion, arcing, or coating damage.
Confirm with the seller
- Exact Lam chamber model is not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.