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LAM RESEARCH 715-140421-028

Lam 8 in anodized aluminum electrode

Market Availability & Pricing

Part number715-140421-028
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales300 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Electrical › RF & Plasma Power › Electrodes
Lam 8 in anodized aluminum electrode
LAM RESEARCH715-140421-028Electrode
Product description
Lam Research 715-140421-028 electrode, aluminum anodized, 8 in context.
Specifications and identifiers
supported details
ComponentElectrode
Supported by all supplied descriptions.
Material/finishAluminum, anodized
Supported by repeated title wording.
Size8 in
Supported by repeated title wording.
Applications
plasma chamber electrode replacementprocess kit maintenanceRF chamber hardwareLam plasma chamber electrode replacement8 in chamber process kit service
How it works

An electrode is a conductive chamber component used in plasma generation or wafer biasing.

Material, anodizing, surface condition, and geometry affect plasma behavior and particle performance.

Technical guide
aluminum_anodized

Aluminum with anodized surface treatment for electrical/chemical surface properties.

8_in
Likely chamber/wafer-size context; verify against drawing.
What to verify before purchase
  • Verify exact electrode position, anodize condition, revision, and chamber model.
  • Inspect for erosion, arcing, or coating damage.
Confirm with the seller
  • Exact Lam chamber model is not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

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