715-330984-001 / CHUCK GAS INJECTION FXD GAP BOTTOM RING / LAM RESEARCHLam Research 715-330984-001 ESC Gas Injection Fixed Gap Bottom Ring Refurbished8819 LAM RESEARCH ELECTROSTATIC CHUCK GAS INJ FXD GAP BOTTOM RING 715-330984-001LAM RESEARCH (LAM) 715-330984-001   CHUCK GAS INJ FXD  GAP BOTTOM RINGLAM RESEARCH 715-330984-001 Gas Injection Ring715-330984-001 / GAS INJECTION RING / LAM RESEARCH CORPORATION	LAM RESEARCH 715-330984-001 BSR Gas Injection RingLAM RESEARCH 715-330984-001 BSR Gas Injection Ring LAM RESEARCH ELECTROSTATIC CHUCK GAS INJ FXD GAP BOTTOM RING 715-330984-001 LRG LAM RESEARCH ELECTROSTATIC CHUCK GAS INJ FXD GAP BOTTOM RING 715-330984-001 LRG LAM RESEARCH ELECTROSTATIC CHUCK GAS INJ FXD GAP BOTTOM RING 715-330984-001 LRG LAM RESEARCH ELECTROSTATIC CHUCK GAS INJ FXD GAP BOTTOM RING 715-330984-001 LRGLam Research 715-330984-001 ESC GAS INJ FXD Gap Bottom Ring New
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LAM RESEARCH 715-330984-001

ESC Gas Injection Fixed-Gap Bottom Ring

Market Availability & Pricing

Part number715-330984-001
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales600 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › Chamber Rings
ESC Gas Injection Fixed-Gap Bottom Ring
LAM RESEARCH715-330984-001ESC gas injection bottom ring
Product description
Electrostatic chuck gas injection fixed-gap bottom ring, also described as a gas injection ring / BSR gas injection ring.
Specifications and identifiers
identification
Normalized item nameESC gas injection fixed-gap bottom ring
Alternate descriptionsGas injection ring; BSR gas injection ring
process context
Associated assembly areaElectrostatic chuck gas injection
ESC gas injection hardware supports gas distribution around or through chuck-related features.
Applications
electrostatic chuck assembliesgas injection pathschamber ring stacksGas injection around an electrostatic chuckFixed-gap bottom ring replacement
How it works

An ESC gas injection ring is a chamber/chuck-adjacent ring used in the gas delivery path around an electrostatic chuck.

Correct geometry and condition can matter for gas distribution, wafer temperature control, and plasma/chamber uniformity.

Technical guide
BSR
Likely bottom support/bottom ring context; verify locally
ESC
Electrostatic chuck
FXD
Fixed
GAP
Gap
What to verify before purchase
  • Verify ring diameter, material, gap geometry, and installed chuck configuration.
  • Confirm whether BSR wording matches the required assembly drawing.
Confirm with the seller
  • Exact material and compatible chamber model are not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

715-330984-001 / CHUCK GAS INJECTION FXD GAP BOTTOM RING / LAM RESEARCH

715-330984-001 / CHUCK GAS INJECTION FXD GAP BOTTOM RING / LAM RESEARCH

USD 579.5600

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Apr 2, 2025 18:42 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 11, 2026 16:20 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
Lam Research 715-330984-001 ESC Gas Injection Fixed Gap Bottom Ring Refurbished

Lam Research 715-330984-001 ESC Gas Injection Fixed Gap Bottom Ring Refurbished

USD 1506.2300

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Jun 22, 2023 19:30 UTC
End recorded: Jan 31, 2025 19:57 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 2, 2026 16:11 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
8819 LAM RESEARCH ELECTROSTATIC CHUCK GAS INJ FXD GAP BOTTOM RING 715-330984-001

8819 LAM RESEARCH ELECTROSTATIC CHUCK GAS INJ FXD GAP BOTTOM RING 715-330984-001

USD 599.7800

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: Jun 13, 2017 03:49 UTC
End recorded: Dec 7, 2024 02:41 UTC
Estimated remaining at check: 15
Estimated sold at check: 0

eBay response captured — Checked Oct 19, 2026 16:03 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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