| Function | Upper chamber liner Protects/lines the upper chamber region. |
|---|---|
| Size | 300 mm indicated Verify exact wafer size and chamber generation. |
| Context | GDP chamber liner GDP appears as a tool/chamber-specific designation. |
| Application | Process chamber liner A plasma/process-facing liner may affect contamination and chamber condition. |
|---|
A chamber liner is a replaceable or serviceable internal component that shields chamber walls and helps define the process environment.
Material, coating, wear state, and exact chamber fit can affect particle control, plasma behavior, and tool recovery after service.
Ceramic materials provide electrical insulation, heat resistance, or plasma compatibility when specified.
High-purity quartz is commonly used for plasma or optical/process-facing components.
Components near plasma or process gas must be compatible with the chemistry and thermal environment.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.
No public documents were listed for this part when captured.
Prices and availability may change. Confirm details with the seller.
Observed public listing price, not an accepted sale amount.
eBay response captured — Checked Oct 12, 2026 16:06 UTC
Availability has not been rechecked; current availability is unknown.
Best Offer · Buy It Now
View on eBayObserved public listing price, not an accepted sale amount.
eBay response captured — Checked Oct 1, 2026 16:23 UTC
Availability has not been rechecked; current availability is unknown.
Best Offer · Buy It Now
View on eBay0 matching listings.
No active-status direct listings are shown on this page.
Auction listing history. Direct marketplace listings are shown separately.
| Currency | Price basis | Records | Minimum | Maximum | Mean |
|---|---|---|---|---|---|
| USD | Observed public listing prices | 2 | 1665.0000 | 3383.0000 | 2524.0000000000000000 |
Amounts without an established currency are retained in the history below and excluded from monetary comparisons. Bids, public listing prices and accepted amounts are distinct; no currency conversion is applied.
| Time recorded | Listing | Observation | Public price | Recorded acceptance |
|---|---|---|---|---|
| Jan 10, 2026 00:29 UTC | 715-801021-012 / UPPER GDP CHAMBER LINER 2300 / LAM RESEARCH CORPORATION | Completed listing price | 600 (currency not captured) | Not established |
| Jun 28, 2025 02:57 UTC | 715-801021-012 / UPPER GDP CHAMBER LINER 2300 / LAM RESEARCH CORPORATION | Completed listing price | 600 (currency not captured) | Not established |
| Feb 14, 2025 16:09 UTC | 715-801021-012 / UPPER GDP CHAMBER LINER 2300 / LAM RESEARCH CORPORATION | Completed listing price | 600 (currency not captured) | Not established |
| Nov 27, 2023 06:05 UTC | 33058 LAM RESEARCH LINER UPPER 300MM (PARTS) 715-801021-012 | Completed listing price | 1500 (currency not captured) | Not established |
| Oct 10, 2022 05:43 UTC | 26628 LAM RESEARCH LINER UPPER 300MM 715-801021-012 | Completed listing price | 2900 (currency not captured) | Not established |
| Jun 18, 2021 16:03 UTC | 715-801021-012 / LAM UPPER GDP CHAMBER LINER / LAM RESEARCH | Completed listing price | 600 (currency not captured) | Not established |
| Jun 4, 2021 16:57 UTC | 715-801021-012 / LAM UPPER GDP CHAMBER LINER / LAM RESEARCH | Completed listing price | 600 (currency not captured) | Not established |
| Apr 20, 2021 15:46 UTC | Lam Research 715-801021-012 300mm Upper Liner Working Surplus | Completed listing price | 607.2 (currency not captured) | Not established |
| Apr 20, 2021 11:15 UTC | 715-801021-012 / LAM UPPER GDP CHAMBER LINER / LAM RESEARCH | Completed listing price | 600 (currency not captured) | Not established |
| Dec 29, 2020 06:18 UTC | Lam Research 715-801021-012 (Rev G) Upper Chamber Liner 300mm | Completed listing price | 149 (currency not captured) | Not established |
| Nov 27, 2020 06:10 UTC | 715-801021-012 / LAM UPPER GDP CHAMBER LINER / LAM RESEARCH | Completed listing price | 600 (currency not captured) | Not established |
| Jan 26, 2015 20:47 UTC | APPLIED MATERIALS (AMAT) 715-801021-012 LAM UPPER GDP CHAMBER LINER | Completed listing price | 325 (currency not captured) | Not established |
Public listing prices, direct recorded sale prices and recorded accepted Best Offer amounts remain distinct. Quantities are source estimates. No aggregate sales total or average is inferred.
Prices and availability may change. Confirm details with the seller.
Legacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
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Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Acceptance recorded by the source; fulfillment is not verified. Availability has not been rechecked; current availability is unknown. Checked Oct 20, 2026 18:04 UTC.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
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