38936 LAM RESEARCH LINER, 2300, UPPER CHAMBER (REFURBISHED) 715-801021-83835047 LAM RESEARCH LINER, UPPER, 300MM-Z AXIS, 2300 KIYO 715-801021-838715-801021-838 / LINER UPPER 300MM-Z AXIS (LAM 2300) (R-HD1) / LAM LAM RESEARCH  LINER 715-801021-838 REV FLAM RESEARCH 715-801021-838 REV B upper LINERLAM Liner 2300 upper chamber coated 715-801021-838OEM Part LAM RESEARCH (LAM) 715-801021-838 Liner 2300 upper chamber coated715-801021-838 / LINER UPPER 300MM-Z AXIS (LAM 2300) (R--HD1) /  LAM RESEARCH LAM, LINER, UPPER 300 MM - Z AXIS, p/n 715-801021-8389316 LAM RESEARCH CHAMBER LINER-Y2O3 715-801021-838New Sealed LAM Research 715-801021-838 300mm Upper Chamber Liner 2300Lam, LOWER LINER PLUG CLEANED, p/n 715-801021-838 Rev C
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LAM RESEARCH 715-801021-838

Upper Chamber Liner for 300 mm Kiyo / 2300

Market Availability & Pricing

Part number715-801021-838
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales9500.03 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › Chamber Liners
Upper Chamber Liner for 300 mm Kiyo / 2300
LAM RESEARCH715-801021-838upper chamber liner
Product description
Upper liner, 300 mm Z-axis / Lam 2300 Kiyo context.
Specifications and identifiers
liner
Component typeUpper chamber liner
Wafer size context300 mm
Platform contextLam 2300 / Kiyo
Revision contextRev B / Rev F referenced in evidence
Revision must be verified.
Applications
Lam 2300/Kiyo chambers300 mm etch systemsProcess-exposed chamber hardwareUpper liner replacementChamber PM/refurbishment
How it works

A chamber liner protects chamber surfaces and helps define the process environment inside a plasma chamber.

Liners are process-exposed and must match tool generation, coating/material, and revision requirements.

What to verify before purchase
  • Confirm revision and material/coating.
  • Verify cleaning/refurbishment status and tool generation.
Confirm with the seller
  • Exact tool compatibility beyond the referenced family/context is not confirmed.
  • Revision-specific substitutions are not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

38936 LAM RESEARCH LINER, 2300, UPPER CHAMBER (REFURBISHED) 715-801021-838

38936 LAM RESEARCH LINER, 2300, UPPER CHAMBER (REFURBISHED) 715-801021-838

USD 6660.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: Oct 24, 2025 07:08 UTC
Estimated remaining at check: 4
Estimated sold at check: 0

eBay response captured — Checked Oct 13, 2026 16:18 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
35047 LAM RESEARCH LINER, UPPER, 300MM-Z AXIS, 2300 KIYO 715-801021-838

35047 LAM RESEARCH LINER, UPPER, 300MM-Z AXIS, 2300 KIYO 715-801021-838

USD 4000.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: Jun 11, 2024 06:02 UTC
End recorded: Dec 7, 2024 13:19 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 6, 2026 16:23 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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