Product description
Lam Research 6 inch Duocel diffuser disk, part 716-008854-001.
Specifications and identifiers
physical characteristics
| Component | Diffuser disk Disk used to diffuse or distribute flow in a chamber or subsystem. |
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| Size | 6 in Size repeatedly stated. |
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| Material/product term | Duocel / Duopcel Porous diffuser material/product naming appears in descriptions. |
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Applications
process chamberswafer supportplasma shieldingchamber rebuildsGas/flow diffusionChamber flow distributionConsumable or chamber hardware replacement
How it works
A chamber hardware component that supports, shields, spaces, clamps, or routes process flow around wafers.
Material, coating, dimensions, revision, and chamber fit are critical for process integrity and contamination control.
What to verify before purchase
- Diameter and thickness
- Material type and porosity
- Cleanliness and chip/crack condition
Confirm with the seller
- Exact tool compatibility beyond the named platform/context
- Calibration or working condition
- Revision interchangeability
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.