716-011493-001 / SPACER, QTZ, 284-303MM / LAM RESEARCH716-011493-001 / SPACER,QTZ,284/303MM,716-011493-001,LAM 9600 / LAM RESEARCHLAM RESEARCH 716-011493-001 SPACER QUARTZ MODULE716-011493-001 / SPACER, QTZ, 284/303MM, LAM 9300 / LAM RESEARCH CORPORATIONLAM RESEARCH 716-011493-001 SPACER QUARTZ MODULE716-011493-001 / SPACER, QTZ, 284/303MM, LAM 9300 / LAM RESEARCH CORPORATION716-011493-001 / SPACER, QTZ, 284/303MM, LAM 9300 / LAM RESEARCH CORPORATIONLAM RESEARCH 716-011493-001 DSG SPACERLAM Research 716-011493-001 DSQ Quartz Spacer716-011493-001 / SPACER,QTZ,284/303MM,716-011493-001,LAM 9600 / LAMLam Research Spacer Quartz P.R. Module 716-011493-001 New / SealedLam Research Spacer Quartz P.R. Module 716-011493-001 New / SealedLam Research Spacer Quartz P.R. Module 716-011493-001 New / SealedLam Research Spacer Quartz P.R. Module 716-011493-001 New / Sealed
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LAM RESEARCH 716-011493-001

Quartz Spacer, 284/303 mm

Market Availability & Pricing

Part number716-011493-001
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales2982.03 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › Ceramic & Quartz Parts
Quartz Spacer, 284/303 mm
LAM RESEARCH716-011493-001Quartz spacer
Product description
Lam Research quartz spacer, 284/303 mm, for Lam 9300/9600-style process hardware context indicated.
Specifications and identifiers
configuration
MaterialQuartz
QTZ/quartz wording is consistent.
Size284/303 mm
Likely a dimensional range or mating diameter; verify from drawing.
Platform contextLam 9300 / 9600 indicated
Platform context appears in evidence but exact chamber configuration should be verified.
process context
FunctionSpacer
Maintains spacing or alignment in a process module.
Equipment context
  • Lam 9300 / 9600
Applications
etch chambersCVD chambersPVD chambersplasma-facing consumablesquartz process-module spacingplasma chamber consumable/hardware
How it works

A quartz, ceramic, or silicon process component is used near the wafer or plasma/process environment.

Material purity, coating, surface condition, dimensions, and process compatibility can affect contamination, plasma behavior, and tool fit.

Technical guide
ceramic

Ceramic materials provide electrical insulation, heat resistance, or plasma compatibility when specified.

quartz

High-purity quartz is commonly used for plasma or optical/process-facing components.

plasma_facing

Components near plasma or process gas must be compatible with the chemistry and thermal environment.

ESC
Electrostatic chuck.
PVD
Physical vapor deposition.
QTZ
Quartz.
What to verify before purchase
  • dimensions
  • quartz condition
  • cleanliness and chips/cracks
  • platform configuration
Confirm with the seller
  • exact process chamber
  • material purity grade

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

716-011493-001 / SPACER, QTZ, 284-303MM / LAM RESEARCH

716-011493-001 / SPACER, QTZ, 284-303MM / LAM RESEARCH

USD 2750.7700

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Jul 3, 2025 19:23 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 12, 2026 16:20 UTC

Availability has not been rechecked; current availability is unknown.

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