Product description
Ring insulator, upper electrode / upper ceramic insulator ring, Lam Research 716-011536-001.
Specifications and identifiers
ring details
| Function | upper electrode insulator ring Electrically/mechanically isolates an upper electrode area. |
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| Material | ceramic Evidence repeatedly identifies ceramic/insulator ring. |
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| Position | upper electrode / upper Repeated evidence position context. |
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Applications
etch chambersCVD chambersupper/lower electrode assembliesfocus and confinement hardwareupper electrode insulationceramic chamber ring replacement
How it works
A chamber ring is a precision mechanical component used around the wafer or chamber opening for focus, insulation, confinement, filler, cover, or shielding functions.
Diameter, material, coating, and chamber position are critical because rings are often process-facing and fit-specific.
Technical guide
aluminum
Aluminum rings are often machined chamber hardware and may be anodized or coated.
ceramic
Ceramic rings provide electrical insulation and can tolerate high-temperature or plasma-adjacent service.
quartz
Quartz is used for high-purity, temperature-tolerant process-facing chamber parts.
- OD
- Outside diameter.
- PRSP
- Process/platform abbreviation in the evidence; verify exact meaning in the tool documentation.
What to verify before purchase
- Verify upper-electrode position, ceramic material, dimensions, and chamber family before installation.
Confirm with the seller
- Exact tool configuration compatibility is not confirmed beyond the evidence provided.
- Current functional condition is not established by part identity alone.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.