716-011536-001 / CERAMIC RING / LAM RESEARCH CORPORATIONLam Research 716-011536-001 Upper Ceramic Insulator RingC3997 LAM RESEARCH LRC UPPER INSULATOR, BOC EDWARDS 500-0377-59 716-011536-001Lam Research 716-011536-001 Upper Ceramic Insulator Ring RefurbishedLam Research 716-011536-001 LRC Upper Insulator Ring RefurbishedLAM RESEARCH 716-011536-001 RING INSULATOR, UPPER ELECTRODE, 105496716-011536-001 / CERAMIC RING / LAM RESEARCH CORPORATION716-011536-001 / CERAMIC RING / LAM RESEARCH CORPORATION716-011536-001 / CERAMIC RING / LAM RESEARCH CORPORATIONLAM Research 716-011536-001 Ceramic Ring15617 LAM RESEARCH RING INSULATOR,UPPER ELECTRODE (NEW) 716-011536-001LAM RESEARCH (LAM) 716-011536-001 Ring, Insulator, UpperLAM 716-011536-001 Ring, Insulator, UpperLam 716-011536-001 Ring Insulator Upper ElectroLAM 716-011536-001 Ring, Insulator, UpperLAM 716-011536-001 Ring, Insulator, UpperLAM 716-011536-001 Ring, Insulator, UpperLAM - 716-011536-001LAM 716-011536-001 Ring, Insulator, Upper716-011536-001 / CERAMIC RING / LAM RESEARCH CORPORATION
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LAM RESEARCH 716-011536-001

Upper Electrode Ceramic Insulator Ring

Market Availability & Pricing

Part number716-011536-001
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales604.55 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › Ceramic & Quartz Rings
Upper Electrode Ceramic Insulator Ring
LAM RESEARCH716-011536-001upper electrode insulator ring
Product description
Ring insulator, upper electrode / upper ceramic insulator ring, Lam Research 716-011536-001.
Specifications and identifiers
ring details
Functionupper electrode insulator ring
Electrically/mechanically isolates an upper electrode area.
Materialceramic
Evidence repeatedly identifies ceramic/insulator ring.
Positionupper electrode / upper
Repeated evidence position context.
Applications
etch chambersCVD chambersupper/lower electrode assembliesfocus and confinement hardwareupper electrode insulationceramic chamber ring replacement
How it works

A chamber ring is a precision mechanical component used around the wafer or chamber opening for focus, insulation, confinement, filler, cover, or shielding functions.

Diameter, material, coating, and chamber position are critical because rings are often process-facing and fit-specific.

Technical guide
aluminum

Aluminum rings are often machined chamber hardware and may be anodized or coated.

ceramic

Ceramic rings provide electrical insulation and can tolerate high-temperature or plasma-adjacent service.

quartz

Quartz is used for high-purity, temperature-tolerant process-facing chamber parts.

OD
Outside diameter.
PRSP
Process/platform abbreviation in the evidence; verify exact meaning in the tool documentation.
What to verify before purchase
  • Verify upper-electrode position, ceramic material, dimensions, and chamber family before installation.
Confirm with the seller
  • Exact tool configuration compatibility is not confirmed beyond the evidence provided.
  • Current functional condition is not established by part identity alone.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

716-011536-001 / CERAMIC RING / LAM RESEARCH CORPORATION

716-011536-001 / CERAMIC RING / LAM RESEARCH CORPORATION

USD 577.1000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Oct 13, 2026 04:57 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 13, 2026 16:00 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
Lam Research 716-011536-001 Upper Ceramic Insulator Ring

Lam Research 716-011536-001 Upper Ceramic Insulator Ring

USD 299.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Sep 17, 2026 20:38 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 11, 2026 16:07 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
C3997 LAM RESEARCH LRC UPPER INSULATOR, BOC EDWARDS 500-0377-59 716-011536-001

C3997 LAM RESEARCH LRC UPPER INSULATOR, BOC EDWARDS 500-0377-59 716-011536-001

USD 500.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: Nov 22, 2024 06:02 UTC
End recorded: Feb 15, 2025 01:19 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 9, 2026 16:21 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
Lam Research 716-011536-001 Upper Ceramic Insulator Ring Refurbished

Lam Research 716-011536-001 Upper Ceramic Insulator Ring Refurbished

USD 558.2400

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Aug 27, 2024 15:32 UTC
End recorded: Dec 6, 2024 16:52 UTC
Estimated remaining at check: 2
Estimated sold at check: 0

eBay response captured — Checked Oct 8, 2026 16:03 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
Lam Research 716-011536-001 LRC Upper Insulator Ring Refurbished

Lam Research 716-011536-001 LRC Upper Insulator Ring Refurbished

USD 508.2400

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Aug 23, 2024 15:31 UTC
End recorded: Dec 7, 2024 19:09 UTC
Estimated remaining at check: 2
Estimated sold at check: 0

eBay response captured — Checked Oct 8, 2026 16:02 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
No image available

Lam Research 716-011536-001 Ceramic Ring New Surplus

USD 550.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Feb 17, 2024 00:01 UTC
End recorded: Dec 7, 2024 11:42 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:14 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
LAM RESEARCH 716-011536-001 RING INSULATOR, UPPER ELECTRODE, 105496

LAM RESEARCH 716-011536-001 RING INSULATOR, UPPER ELECTRODE, 105496

USD 950.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: May 16, 2022 17:30 UTC
End recorded: Dec 6, 2024 20:25 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 30, 2026 16:03 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay

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