LAM RESEARCH FACE UPPER ELECTRODE , P/N 716-011540-001Lam Research 716-011540-001 Upper Focus RingLAM 716-011540-001 Upper Face Ring CeramicLAM RESEARCH 4400 UPPER FACE RING 716-011540-00115570 LAM RESEARCH RING,FACE,UPPER ELECTRODE (NEW) 716-011540-001Lam Research 716-011540-001 Upper Face Ring CeramicLam Research 716-011540-001 Upper Focus RingLam FOCUS RING, UPPER, p/n 716-011540-001LAM 716-011540-001 RING FACE UPPER ELECTRODELam Research RING FACER UPPER (CERAMIC) 716-011540-001LAM 716-011540-001 RING FACE UPPER ELECTRODELAM 716-011540-001 RING FACE UPPER ELECTRODELAM RESEARCH 716-011540-001 RING FACE UPPER ELECTRODELAM RESEARCH 716-011540-001 RING FACE UPPER ELECTRODELam Research 716-011540-001 Upper Focus RingLAM Ring 716-011540-001 Rev F, New, Sealed
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LAM RESEARCH 716-011540-001

upper electrode face ring

Market Availability & Pricing

Part number716-011540-001
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales525 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › Ceramic & Quartz Parts
upper electrode face ring
LAM RESEARCH716-011540-001upper electrode face ring
Product description
Lam Research upper electrode face ring / upper ceramic face ring, part 716-011540-001.
Specifications and identifiers
revision notes
Revision mentionsRev F in one description
Verify exact revision before replacement.
supported details
Item typeRing, face, upper electrode
Material wordingCeramic
Several descriptions identify it as a ceramic upper face ring.
Alternate wordingUpper focus ring / upper face ring
Terminology varies but points to upper electrode/chamber ring hardware.
Equipment context
  • Lam Research 4400
Applications
upper electrode assembliesplasma confinement hardwarewafer-edge chamber hardwareupper electrode/chamber ring replacementplasma-facing ceramic ring servicewafer-edge or electrode-area hardware maintenance
How it works

A ceramic ring used near the electrode or wafer area inside a plasma chamber.

Ceramic chamber hardware provides electrical insulation, thermal stability, and process-area protection.

Technical guide
ceramic

A hard, insulating material often used in plasma-facing or high-temperature chamber components.

What to verify before purchase
  • Revision
  • Material and coating
  • Upper electrode geometry
  • Tool/chamber generation
Confirm with the seller
  • Guaranteed Lam 4400-only compatibility
  • Electrical properties
  • Exact ceramic grade

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

LAM RESEARCH FACE UPPER ELECTRODE , P/N 716-011540-001

LAM RESEARCH FACE UPPER ELECTRODE , P/N 716-011540-001

USD 995.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Jan 20, 2022 04:30 UTC
End recorded: Dec 6, 2024 19:41 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 29, 2026 16:21 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
Lam Research 716-011540-001 Upper Focus Ring

Lam Research 716-011540-001 Upper Focus Ring

USD 750.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
IL
Condition: Used
Listed: Feb 9, 2020 07:07 UTC
End recorded: Dec 7, 2024 09:24 UTC
Estimated remaining at check: 2
Estimated sold at check: 3

eBay response captured — Checked Oct 20, 2026 16:12 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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