716-011570-001 / FILLER, ORIFICE WAFER CLAMP, CERAMIC REVC / LAM RESEARCH CORP716-011570-001 / FILLER, ORIFICE WAFER CLAMP, CERAMIC REVC / LAM RESEARCH CORP716-011570-001 / FILLER, ORIFICE WAFER CLAMP, CERAMIC REVC / LAM RESEARCH CORP716-011570-001 / FILLER, ORIFICE WAFER CLAMP, CERAMIC REVC / LAM RESEARCH CORP716-011570-001 / FILLER, ORIFICE WAFER CLAMP, CERAMIC REVC / LAM RESEARCH CORPLAM RESEARCH 716-011570-001 LOWER FILLER PRESSURE RING15546 LAM RESEARCH FILLER, ORIFICE WAFER CLAMP, CERAMIC (NEW) 716-011570-001LAM Lower Orfice Filler Ring, Wafer Clamp 716-011570-001 RefurbishedLAM Lower Orfice Filler Ring, Wafer Clamp 716-011570-001 LAM Research 716-011570-001 Ceramic Ring, New, SealedLAM 716-011570-001 ORIFICE FILLER RING
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LAM RESEARCH 716-011570-001

Ceramic Orifice Filler Ring

Market Availability & Pricing

Part number716-011570-001
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales2300 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › Ceramic & Quartz Parts
Ceramic Orifice Filler Ring
LAM RESEARCH716-011570-001Ceramic filler/orifice ring
Product description
Filler, orifice wafer clamp, ceramic; lower orifice filler/pressure ring
Specifications and identifiers
identification
Normalized item typeCeramic orifice filler ring
Process/chamber ring tied to wafer clamp/orifice area.
physical attributes
MaterialCeramic
Repeated phrase identifies ceramic construction.
Functional areaWafer clamp / orifice
Indicates a clamp-adjacent or orifice-adjacent ring component.
Applications
wafer clamp assembliesplasma chamber hardwareprocess ring setsWafer clamp filler ringProcess chamber ceramic ring replacement
How it works

A ceramic ring or filler component used around an orifice, clamp, or chamber interface.

Ceramic process parts must match the chamber geometry and material requirements to avoid plasma damage, particles, or mechanical interference.

Technical guide
ceramic

Ceramic material is often used where electrical insulation, heat resistance, or plasma compatibility is needed.

stainless steel

Corrosion-resistant metal commonly used in vacuum and gas-delivery hardware.

cryogenic vacuum technology

Cryogenic pumping/regeneration hardware used in high-vacuum systems.

What to verify before purchase
  • Exact revision, including Rev C references
  • Upper/lower ring position
  • Surface wear, chips, or cleaning history

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

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