LAM Research 716-011651-006 Wafer Clamp RingLAM Research 716-011651-006 Ring Edge Wafer Clamp 6 inch, 106317Lam Research Ring, Edge, Wafer Clamp . 6” 716-011651-006LAM Research 716-011651-006 Ring Edge Wafer Clamp 6’ R3-R4-4 *new surplus*LAM RESEARCH 716-011830-006 FOCUS RING, 716-011651-006 RING EDGELAM RESEARCH 716-011651-006 7.0 OD 5.986 ID .490THKLAM RESEARCH 716-011651-006 7.0 OD 5.986 ID .490THKLAM Research 716-011651-006 Wafer Clamp RingLAM RESEARCH 716-011651-006 RING EDGELAM RESEARCH 716-011651-006 7.0 OD 5.986 ID .490THKLam Research 716-011651-006 6" Wafer Clamp Edge Ring NewLam Research LAM 716-011651-006 RING EDGE WAFER CLAMP 6LAM RESEARCH 716-011651-006 RING EDGE WAFER CLAMP 6"Lam Research OnTrak 716-011651-006 - RING EDGE WAFER CLAMP 6.00" - NEWLAM RESEARCH WAFER CLAMP EDGE RING 716-011651-006
Image 1 of 15

LAM RESEARCH 716-011651-006

6-inch Wafer Clamp Edge Ring

Market Availability & Pricing

Part number716-011651-006
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales240 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Wafer Handling › Wafer Clamp Rings
6-inch Wafer Clamp Edge Ring
LAM RESEARCH716-011651-006wafer clamp edge ring
Product description
Ring, edge, wafer clamp, 6 inch.
Specifications and identifiers
supported identity
FunctionWafer clamp edge ring
Repeated evidence supports a ring used at the wafer-clamp edge.
Diameter6 inch
Repeated evidence includes 6-inch wording.
Dimensions clue7.0 OD, 5.986 ID, .490 thickness
One source provides dimensions; verify from drawing or measurement.
Equipment context
  • Lam Research / OnTrak equipment
Applications
etch chambersCVD chambersPVD chamberswafer clampingprocess shieldingwafer clamping hardwareedge ring replacementLam process chamber service
How it works

A wafer-contact or process-facing ring, shield, window, pedestal, clamp, or plate used near the wafer/process area.

Diameter, material, coating, cleanliness, notch orientation, and revision directly affect process fit and contamination risk.

Technical guide
evidence_scope

Only material terms supported by provided evidence should be treated as likely.

typical

quartz, ceramic, alumina, stainless steel, Vespel, aluminum, or process-specific coated metals

CVD

chemical vapor deposition

ESC

electrostatic chuck

PVD

physical vapor deposition

200mm
8-inch wafer-class tooling
300mm
12-inch wafer-class tooling
What to verify before purchase
  • Verify exact revision and configuration against tool BOM or installed part markings.
  • Confirm physical condition, connector/keying, and cleanliness before installation.
Confirm with the seller
  • Exact tool compatibility beyond the supported description.
  • Detailed dimensional drawing and full material specification.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

LAM Research 716-011651-006 Wafer Clamp Ring

LAM Research 716-011651-006 Wafer Clamp Ring

USD 240.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Jun 25, 2024 00:02 UTC
End recorded: Dec 7, 2024 12:58 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 7, 2026 16:04 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
LAM Research 716-011651-006 Ring Edge Wafer Clamp 6 inch, 106317

LAM Research 716-011651-006 Ring Edge Wafer Clamp 6 inch, 106317

USD 595.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Jun 7, 2022 18:31 UTC
End recorded: Dec 7, 2024 10:35 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 30, 2026 16:06 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
Lam Research Ring, Edge, Wafer Clamp . 6” 716-011651-006

Lam Research Ring, Edge, Wafer Clamp . 6” 716-011651-006

USD 460.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: May 15, 2022 21:00 UTC
End recorded: Dec 7, 2024 10:42 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 30, 2026 16:03 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
LAM Research 716-011651-006 Ring Edge Wafer Clamp 6’ R3-R4-4 *new surplus*

LAM Research 716-011651-006 Ring Edge Wafer Clamp 6’ R3-R4-4 *new surplus*

USD 500.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: May 15, 2020 22:45 UTC
End recorded: Dec 7, 2024 10:11 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 20, 2026 16:16 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

Direct marketplace listings

0 matching listings.

No active-status direct listings are shown on this page.

Marketplace search uses listing titles and service keywords, with quoted phrases and -excluded terms.