Product description
6 in Lam Research focus ring, described as alumina/lower focus ring and associated with Lam 9600 context.
Specifications and identifiers
identified features
| Diameter | 6 in Repeated size clue. |
|---|
| Material clue | alumina Several descriptions identify alumina. |
|---|
| Position clue | lower Some descriptions say lower focus ring. |
|---|
| Platform clue | Lam 9600 One repeated description references Lam 9600. |
|---|
Applications
process chamber hardwarewafer handling hardwarePVD, CVD, or etch process kitsPlasma confinement and edge controlEtch chamber process-kit replacement
How it works
A mechanical chamber, handling, or process-kit component used inside or around semiconductor equipment.
Geometry, material, coating, and process position can affect plasma behavior, wafer handling, contamination control, and fit.
Technical guide
material_note
Verify material and coating from markings or OEM documentation before process use.
What to verify before purchase
- Material and coating
- Diameter and thickness
- Revision and exact chamber fit
Confirm with the seller
- Exact process chemistry compatibility
- Whether wear/reuse is acceptable
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.