Product description
Lam Research wafer clamp attachment plate / ceramic clamp attachment ring, part 716-011923-001.
Specifications and identifiers
physical characteristics
| Function | Wafer clamp attachment plate Mechanical component used with wafer clamping hardware. |
|---|
| Material context | Ceramic noted in some descriptions Verify material and surface condition. |
|---|
| Secondary marking | 1502301-02 Associated identifier noted in one description. |
|---|
Applications
process chamberswafer supportplasma shieldingchamber rebuildsWafer clamping hardwareChamber mechanical rebuild
How it works
A chamber hardware component that supports, shields, spaces, clamps, or routes process flow around wafers.
Material, coating, dimensions, revision, and chamber fit are critical for process integrity and contamination control.
What to verify before purchase
- Ceramic condition/chips
- Dimensions and revision
- Compatibility with specific Lam chamber
Confirm with the seller
- Exact tool compatibility beyond the named platform/context
- Calibration or working condition
- Revision interchangeability
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.