Product description
Plate / clamp attachment plate for interior bellows attachment
Specifications and identifiers
component details
| Component type | Clamp attachment plate Mechanical plate used for fastening or attaching a chamber/bellows-related assembly. |
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| Context term | Interior bellows Indicates use near an internal bellows or flexible vacuum/chamber interface. |
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| Revisions observed | A, C, E Revision must be matched to the tool requirement. |
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identification
| Manufacturer | LAM RESEARCH |
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| Part number | 716-011963-003 |
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Applications
process chamber hardwarewafer-area process kitsmechanical maintenancetool rebuild or refurbishmentChamber mechanical attachmentBellows-related mounting or retentionVacuum tool mechanical service
How it works
A clamp attachment plate is a mechanical or process-area component used for mounting, shielding, retention, positioning, or wafer/chamber interface service.
Small differences in dimensions, material, coating, and revision can affect fit, process performance, and contamination control.
Technical guide
Bellows
A flexible sealed element used to allow motion while maintaining isolation or vacuum integrity.
Clamp attachment
Hardware interface used to retain or secure adjacent components.
What to verify before purchase
- Revision letter
- Cleaning/refurbishment condition
- Plate geometry and mounting hole pattern
Confirm with the seller
- Material grade
- Specific Lam platform
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.