716-020905-001 / RING FILLER LOWER WAFER CLAMP / LAM RESEARCH CORPORATION716-020905-001 / RING FILLER LOWER WAFER CLAMP / LAM RESEARCH CORPORATION15386 LAM RESEARCH FILLER RING LOWER CLAMP,CERAMIC 716-020905-001LAM Research Filler Lower Wafer Clamp Ceramic Ring Assy * 716-020905-001 Rev DLAM Research Filler Lower Wafer Clamp Ceramic Ring Assy * 716-020905-001 Rev DLAM Lower Filler Ring 716-020905-001 RefurbishedLAM RESEARCH 716-020905-001 RING FILLER LOWER WAFER LAM 9600LAM Lower Filler Ring, Wafer Clamp 716-020905-001 RefurbishedLAM RESEARCH 716-020905-001 RING FILLER LOWER WAFER CLAMP NEW OEMLAM RESEARCH 716-020905-001 RING FILLER LOWER WAFER CLAMP NEW OEMLAM RESEARCH 716-020905-001 RING FILLER LOWER WAFER CLAMP NEW OEM
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LAM RESEARCH 716-020905-001

Lower wafer clamp filler ring

Market Availability & Pricing

Part number716-020905-001
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales850.68 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › Process Chamber Hardware
Lower wafer clamp filler ring
LAM RESEARCH716-020905-001wafer clamp filler ring
Product description
Lower wafer clamp filler ring, described as a ceramic ring/filler ring assembly for Lam Research wafer clamp hardware.
Specifications and identifiers
chamber
Item formLower filler ring
Ring used in a wafer clamp or chamber interface.
Material referenceCeramic
Ceramic is referenced in some item descriptions and should be verified physically.
Equipment context
  • Lam 9600
Applications
process chamber maintenancePVD/CVD/etch chamber hardwarewafer-handling or chamber interface assembliesWafer clamp ring hardwareChamber filler or lower ring replacement
How it works

A chamber mechanical component is a physical part used in or around a process chamber, wafer handling area, or vacuum hardware.

Dimensional fit, material compatibility, surface condition, and revision can affect process performance, vacuum integrity, and particle control.

What to verify before purchase
  • Ceramic material and coating
  • Revision, including Rev D where relevant
  • Lam platform/chamber fit
Confirm with the seller
  • Exact Lam model fit outside the provided references

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

716-020905-001 / RING FILLER LOWER WAFER CLAMP / LAM RESEARCH CORPORATION

716-020905-001 / RING FILLER LOWER WAFER CLAMP / LAM RESEARCH CORPORATION

USD 850.6800

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Jul 25, 2024 21:32 UTC
End recorded: Dec 7, 2024 07:45 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 7, 2026 16:20 UTC

Availability has not been rechecked; current availability is unknown.

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