LAM RESEARCH 716-026652-002
Bottom Edge Ring
Product Overview
FOCUS RING
Part number
716-026652-002
Manufacturer
LAM RESEARCH
Current availability
4 active
Listings tracked
24 tracked
First seen
Oct 8, 2013
Most recent
Apr 8, 2026
Average observed price
$724.14
Bottom Edge Ring
LAM RESEARCH 716-026652-002 bottom edge ring
Reference Description
Ring, edge, bottom, 200-300 mm; quartz edge ring context for Lam Research chamber hardware.
Key Details
Identified Features
| Item noun | Edge ring, bottom | Ring-shaped chamber component positioned at or near the wafer edge region. |
| Wafer size context | 200-300 mm | Evidence repeatedly includes 200-300 mm wording. |
| Material indication | Quartz | Several sources identify quartz, though material should still be verified by inspection/BOM. |
What This Is
An edge ring is a chamber ring positioned around the wafer edge to help control plasma/process uniformity and protect adjacent hardware.
Edge rings are often process-sensitive consumables; material and geometry affect etch/deposition behavior and tool matching.
Common Uses & Applications
- plasma etch chambers
- wafer edge process control
- chamber consumable replacement
- Chamber edge ring replacement
- Wafer-edge process control hardware
Technical & Material Context
Buyer Notes
Verify before purchase
- Verify material, inner/outer dimensions, and whether bottom/BOT orientation is required.
- Confirm exact chamber model and revision.
Not confirmed from available evidence
- Exact chamber platform and final material grade are not confirmed.
Reference information is compiled from observed listings and technical enrichment.
Verify fitment, revision, and specifications before purchase.
24 listings tracked
4 active
4 sold
20 completed
Oct 8, 2013
First Seen
Apr 8, 2026
Most Recent
$724.14
Average Price
$1,044.00
Last Sold Price
Apr 30, 2026
Price History (Last 50 Items)
Related Part Numbers
💡 Market Summary
Our comprehensive database contains 24 total listings for part number 716-026652-002 from LAM RESEARCH. Currently, there are 4 active listings available for purchase. Historical data for this part extends back to October 2013, with the most recent activity on April 8, 2026.
Price analysis reveals an average selling price of $724.14, with observed prices ranging from $249.00 to $3,507.20. Market activity shows 20 completed transactions, representing 4 units sold. Whether you're looking to buy or sell, this historical data can help you understand current market conditions and pricing trends for this part.
Available Listings
Current and Historical Listings (24 Total)
716-026652-002 /RING, EDGE, BOT 200-300MM /LAM RESEARCH CORPORATION
Listed: Apr 8, 2026
● Active
View Listing →
$1,044.00
C5008 LAM RESEARCH RING, EDGE, BOT, 200-300MM 716-026652-002
Listed: Jan 24, 2025
● Active
View Listing →
$450.00
Lam Research 716-026652-002 Quartz Bot Edge Ring 200-300mm New Surplus
Listed: Jul 23, 2020
● Active
View Listing →
$3,507.20
716-026652-002 /RING, EDGE, BOT 200-300MM /LAM RESEARCH CORPORATION
Start: Jan 3, 2026
End: Apr 30, 2026
Sold: 1
Completed
$1,044.00
716-026652-002 /RING, EDGE, BOT 200-300MM /LAM RESEARCH CORPORATION
Start: Dec 30, 2022
End: Jan 3, 2026
Sold: 1
Completed
$1,200.00
LAM RESEARCH LAM 716-026652-002 QUARTZ BOT EDGE RING 200-300MM
Start: Sep 18, 2023
End: May 1, 2025
Sold: 1
Completed
$1,900.00
Quartz (LAM) 716-026652-002 Ring Edge BOT 200-300mm
Start: Jun 8, 2016
End: Dec 29, 2022
Sold: 0
Completed
$438.90
716-026652-002 / RING, EDGE, BOT 200-300MM / LAM RESEARCH CORPORATION
Start: Dec 15, 2020
End: Dec 27, 2022
Sold: 0
Completed
$350.00
LAM 716-026652-002 RING, FOCUS
Start: Dec 20, 2016
End: Jun 20, 2020
Sold: 0
Completed
$350.00
LAM RESEARCH 716-026652-002 RING EDGE BOTTOM 300MM
Start: Jun 27, 2018
End: Jul 27, 2018
Sold: 0
Completed
$275.00
LAM Research 716-026652-002 Ring, Edge, Bot, 200-300MM
Start: Dec 21, 2017
End: Jun 19, 2018
Sold: 0
Completed
$601.18
LAM RESEARCH 716-026652-002 RING EDGE BOTTOM 300MM
Start: May 8, 2018
End: Jun 7, 2018
Sold: 0
Completed
$275.00
LAM RESEARCH 716-026652-002 RING EDGE BOTTOM 300MM
Start: Mar 21, 2018
End: Apr 20, 2018
Sold: 0
Completed
$295.00
LAM Research 716-026652-002 Ring, Edge, Bot, 200-300MM
Start: Aug 17, 2017
End: Dec 19, 2017
Sold: 0
Completed
$280.00
LAM 716-026652-002 RING, FOCUS
Start: Jul 9, 2016
End: Sep 15, 2016
Sold: 0
Completed
$350.00
LAM 716-026652-002 RING, FOCUS
Start: Feb 25, 2016
End: Jun 24, 2016
Sold: 0
Completed
$350.00
OEM Part LAM RESEARCH (LAM) 716-026652-002 Ring Edge BOT 200-300mm
Start: Aug 25, 2015
End: Mar 23, 2016
Sold: 0
Completed
$495.00
Lam 716-031257-309 716-026652-002 716-012640-012 Process Kit Parts New Surplus
Start: Sep 29, 2014
End: Apr 10, 2015
Sold: 1
Completed
$2,479.11
LAM RESEARCH RING,EDGE,BOT,200-300MM 716-026652-002
Start: Jan 9, 2014
End: Feb 8, 2014
Sold: 0
Completed
$249.00
LAM RESEARCH RING,EDGE,BOT,200-300MM 716-026652-002
Start: Nov 1, 2013
End: Dec 31, 2013
Sold: 0
Completed
$249.00
LAM RESEARCH RING,EDGE,BOT,200-300MM 716-026652-002
Start: Oct 23, 2013
End: Oct 30, 2013
Sold: 0
Completed
$249.00
LAM RESEARCH RING,EDGE,BOT,200-300MM 716-026652-002
Start: Oct 16, 2013
End: Oct 23, 2013
Sold: 0
Completed
$249.00
LAM RESEARCH RING,EDGE,BOT,200-300MM 716-026652-002
Start: Oct 8, 2013
End: Oct 15, 2013
Sold: 0
Completed
$249.00
Affiliate Notice: We may earn a commission from links on this page. This does not affect how we display results.
Additional marketplace search
Search directly on eBay for more options
Search eBay for 716-026652-002