Product description
Lam Research 716-028123-002 ceramic filler ring.
Specifications and identifiers
identification
| Description | Ring, filler |
|---|
| Material | Ceramic |
|---|
Applications
process chamber kitsplasma-facing hardwarewafer-area consumablesCeramic chamber ring replacementProcess chamber filler ring serviceLam chamber hardware maintenance
How it works
A shaped ring used in or around a process chamber, wafer support, or gas/exhaust path.
Material, diameter, flatness, and surface condition can affect fit, plasma behavior, contamination, and process uniformity.
Technical guide
ceramic
Hard, heat-resistant nonmetallic material commonly used for plasma-facing or insulating chamber parts.
What to verify before purchase
- Verify material grade and exact dimensions
- Inspect for chips, cracks, or process wear
- Confirm chamber/platform compatibility
Confirm with the seller
- Exact chamber model is not confirmed
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.