Product description
Lam Research 716-028447-002 ceramic disk, with TCP window context in one reference.
Specifications and identifiers
identification
| Description | Ceramic disk |
|---|
| Alternate context | TCP ceramic window context |
|---|
| Revision reference | Rev B |
|---|
Applications
process chamber kitsplasma-facing hardwarewafer-area consumablesCeramic chamber disk/window replacementTCP chamber hardware servicePlasma-facing ceramic component service
How it works
A shaped ring used in or around a process chamber, wafer support, or gas/exhaust path.
Material, diameter, flatness, and surface condition can affect fit, plasma behavior, contamination, and process uniformity.
Technical guide
ceramic
Hard, heat-resistant nonmetallic material commonly used for plasma-facing or insulating chamber parts.
What to verify before purchase
- Verify whether the part is used as a disk or window in the target module
- Confirm dimensions, revision, and material grade
- Inspect for chips, cracks, and erosion
Confirm with the seller
- Exact TCP module placement is not confirmed
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.