716-028447-002 / DISK CERAMIC / LAM RESEARCHLAM Research 716-028447-002 Disk Ceramic R3-R5-5 *new surplus, 90 day warranty*LAM 716-028447-002 Window, Ceramic, TCP, 06-14212-00, Farmon ID 413131LAM RESEARCH CERAMIC DISC 716-028447-002716-028447-002 / DISK CERAMIC / LAM RESEARCH716-028447-002 / DISK CERAMIC / LAM RESEARCH716-028447-002 / DISK CERAMIC / LAM RESEARCHLam Research 716-028447-002 Ceramic Disk Rev. B NewLAM RESEARCH 716-028447-002 DISK  CERAMICLAM RESEARCH 716-028447-002 DISK  CERAMICLAM RESEARCH 716-028447-002 DISK  CERAMICLAM RESEARCH 716-028447-002 DISK  CERAMICLAM RESEARCH 716-028447-002 DISK  CERAMIC
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LAM RESEARCH 716-028447-002

Lam Ceramic Disk

Market Availability & Pricing

Part number716-028447-002
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported salesNo qualifying listing found
Mechanical › Chamber Components › Ceramic & Quartz Parts
Lam Ceramic Disk
LAM RESEARCH716-028447-002Ceramic disk
Product description
Lam Research 716-028447-002 ceramic disk, with TCP window context in one reference.
Specifications and identifiers
identification
DescriptionCeramic disk
Alternate contextTCP ceramic window context
Revision referenceRev B
Applications
process chamber kitsplasma-facing hardwarewafer-area consumablesCeramic chamber disk/window replacementTCP chamber hardware servicePlasma-facing ceramic component service
How it works

A shaped ring used in or around a process chamber, wafer support, or gas/exhaust path.

Material, diameter, flatness, and surface condition can affect fit, plasma behavior, contamination, and process uniformity.

Technical guide
ceramic

Hard, heat-resistant nonmetallic material commonly used for plasma-facing or insulating chamber parts.

What to verify before purchase
  • Verify whether the part is used as a disk or window in the target module
  • Confirm dimensions, revision, and material grade
  • Inspect for chips, cracks, and erosion
Confirm with the seller
  • Exact TCP module placement is not confirmed

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

716-028447-002 / DISK CERAMIC / LAM RESEARCH

716-028447-002 / DISK CERAMIC / LAM RESEARCH

USD 409.9500

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Aug 27, 2026 05:20 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 17, 2026 16:05 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
LAM Research 716-028447-002 Disk Ceramic R3-R5-5 *new surplus, 90 day warranty*

LAM Research 716-028447-002 Disk Ceramic R3-R5-5 *new surplus, 90 day warranty*

USD 750.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: May 15, 2020 21:17 UTC
End recorded: Dec 7, 2024 10:11 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 20, 2026 16:16 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
LAM 716-028447-002 Window, Ceramic, TCP, 06-14212-00, Farmon ID 413131

LAM 716-028447-002 Window, Ceramic, TCP, 06-14212-00, Farmon ID 413131

USD 750.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Jan 7, 2016 18:23 UTC
End recorded: Dec 6, 2024 21:59 UTC
Estimated remaining at check: 3
Estimated sold at check: 0

eBay response captured — Checked Oct 18, 2026 16:04 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
LAM RESEARCH CERAMIC DISC 716-028447-002

LAM RESEARCH CERAMIC DISC 716-028447-002

USD 399.9900

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Jan 2, 2016 23:42 UTC
End recorded: Dec 6, 2024 21:57 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 18, 2026 16:04 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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