716-031453-001 / RING, LOWER FILLER / LAM RESEARCHLAM Research, 716-031453-001 / Lower Filler Ring Ceramic LAM 9600LAM RESEARCH (LAM) 716-031453-001LAM Research 716-031453-001 Lower Filler Ring Ceramic LAM 9600Lam Research 716-031453-001 LOWER CHAMBER RING, FILLER, 108563LAM 716-031453-001 Ring Filler Lower Chamber *new surplusLam Research LOWER CHAMBER RING, P/N 716-031453-001, NOSLAM RESEARCH LOWER CHAMBER FILLER RING 716-031453-001LAM Research 716-031453-001716-031453-001 / RING, LOWER FILLER / LAM RESEARCH716-031453-001 / RING, LOWER FILLER / LAM RESEARCH716-031453-001 / RING, LOWER FILLER / LAM RESEARCHLam Research 716-031453-001LAM 716-031453-001LAM Research 716-031453-001 Lower Filler Ring Ceramic LAM 9600Lam Research 716-031453-001Lam Research 716-031453-001 LOWER CHAMBER RING, 108080Lam Research Ceramic Chamber Ring Filler 716-031453-001LAM Research 716-031453-001 RING,FILLER,LOWER CHAMBERLAM Research 716-031453-001
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LAM Research 716-031453-001

Lower Chamber Filler Ring

Market Availability & Pricing

Part number716-031453-001
ManufacturerLAM Research
Current availabilitySee listings below
Latest completed listing with reported sales450 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › Ceramic & Quartz Rings
Lower Chamber Filler Ring
LAM Research716-031453-001lower chamber filler ring
Product description
Ring, lower filler / lower chamber filler ring, ceramic context noted for Lam Research 716-031453-001.
Specifications and identifiers
ring details
Functionlower chamber filler ring
Fills or completes a lower chamber ring area.
Positionlower chamber
Repeated evidence identifies lower chamber/lower filler position.
Material contextceramic
Several evidence records identify a ceramic lower filler ring.
Equipment context
  • Lam 9600
Applications
etch chambersCVD chambersupper/lower electrode assembliesfocus and confinement hardwarelower chamber filler ring replacementceramic chamber hardware
How it works

A chamber ring is a precision mechanical component used around the wafer or chamber opening for focus, insulation, confinement, filler, cover, or shielding functions.

Diameter, material, coating, and chamber position are critical because rings are often process-facing and fit-specific.

Technical guide
aluminum

Aluminum rings are often machined chamber hardware and may be anodized or coated.

ceramic

Ceramic rings provide electrical insulation and can tolerate high-temperature or plasma-adjacent service.

quartz

Quartz is used for high-purity, temperature-tolerant process-facing chamber parts.

OD
Outside diameter.
PRSP
Process/platform abbreviation in the evidence; verify exact meaning in the tool documentation.
What to verify before purchase
  • Verify material, lower-chamber position, and whether it is for the referenced Lam 9600 context or another Lam configuration.
Confirm with the seller
  • Exact tool configuration compatibility is not confirmed beyond the evidence provided.
  • Current functional condition is not established by part identity alone.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

716-031453-001 / RING, LOWER FILLER / LAM RESEARCH

716-031453-001 / RING, LOWER FILLER / LAM RESEARCH

USD 1076.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Aug 29, 2026 13:19 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 17, 2026 16:06 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
LAM Research, 716-031453-001 / Lower Filler Ring Ceramic LAM 9600

LAM Research, 716-031453-001 / Lower Filler Ring Ceramic LAM 9600

USD 1130.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Dec 5, 2024 08:02 UTC
End recorded: Dec 7, 2024 07:23 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 9, 2026 16:27 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
LAM RESEARCH (LAM) 716-031453-001

LAM RESEARCH (LAM) 716-031453-001

USD 299.9500

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Sep 24, 2024 07:32 UTC
End recorded: Dec 7, 2024 05:32 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 8, 2026 16:16 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
LAM Research 716-031453-001 Lower Filler Ring Ceramic LAM 9600

LAM Research 716-031453-001 Lower Filler Ring Ceramic LAM 9600

USD 485.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Jun 25, 2024 00:02 UTC
End recorded: Dec 7, 2024 12:58 UTC
Estimated remaining at check: 2
Estimated sold at check: 0

eBay response captured — Checked Oct 7, 2026 16:04 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
Lam Research 716-031453-001 LOWER CHAMBER RING, FILLER, 108563

Lam Research 716-031453-001 LOWER CHAMBER RING, FILLER, 108563

USD 700.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Jul 29, 2022 23:32 UTC
End recorded: Dec 7, 2024 12:22 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 30, 2026 16:13 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
LAM 716-031453-001 Ring Filler Lower Chamber *new surplus

LAM 716-031453-001 Ring Filler Lower Chamber *new surplus

USD 1250.00

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: May 19, 2021 22:10 UTC
End recorded: Dec 6, 2024 18:29 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 21, 2026 11:48 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
Lam Research LOWER CHAMBER RING, P/N 716-031453-001, NOS

Lam Research LOWER CHAMBER RING, P/N 716-031453-001, NOS

USD 750.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Oct 17, 2018 14:58 UTC
End recorded: Dec 7, 2024 04:39 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 19, 2026 16:14 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
LAM RESEARCH LOWER CHAMBER FILLER RING 716-031453-001

LAM RESEARCH LOWER CHAMBER FILLER RING 716-031453-001

USD 499.9900

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Jan 2, 2016 22:49 UTC
End recorded: Dec 6, 2024 21:57 UTC
Estimated remaining at check: 4
Estimated sold at check: 0

eBay response captured — Checked Oct 18, 2026 16:04 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
LAM Research 716-031453-001

LAM Research 716-031453-001

USD 550.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Nov 4, 2012 20:15 UTC
End recorded: Dec 6, 2024 16:42 UTC
Estimated remaining at check: 1
Estimated sold at check: 1

eBay response captured — Checked Oct 17, 2026 16:07 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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