LAM RESEARCH 716-037794-002 CERAMIC RINGLam Research 716-037794-002 Rev. A 9-1/2"ID ESC Chuck Wafer Guard RingLam Research 716-037794-002 Rev. A 9-1/2"ID ESC Chuck Wafer Guard RingLam Research 716-037794-002 Rev. A 9-1/2"ID ESC Chuck Wafer Guard RingLam Research 716-037794-002 Rev. A 9-1/2"ID ESC Chuck Wafer Guard RingLam Research 716-037794-002 Rev. A 9-1/2"ID ESC Chuck Wafer Guard RingLam Research 716-037794-002 Rev. A 9-1/2"ID ESC Chuck Wafer Guard RingLam Research 716-037794-002 Rev. A 9-1/2"ID ESC Chuck Wafer Guard RingLam Research 716-037794-002 Rev. A 9-1/2"ID ESC Chuck Wafer Guard RingLam Research 716-037794-002 Rev. A 9-1/2"ID ESC Chuck Wafer Guard RingLam Research 716-037794-002 Rev. A 9-1/2"ID ESC Chuck Wafer Guard RingLam Research 716-037794-002 Rev. A 9-1/2"ID ESC Chuck Wafer Guard RingLam Research 716-037794-002 Rev. A 9-1/2"ID ESC Chuck Wafer Guard RingLam Research 716-037794-002 Rev. A Ring Semiconductor PartLam Research 716-037794-002 Rev. 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LAM RESEARCH 716-037794-002

ESC Chuck Wafer Guard Ring

Market Availability & Pricing

Part number716-037794-002
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales51.99 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › Ceramic & Quartz Parts
ESC Chuck Wafer Guard Ring
LAM RESEARCH716-037794-002ESC Chuck Wafer Guard Ring
Product description
Rev. A 9-1/2 inch ID ESC chuck wafer guard ring; also described as a ceramic ring.
Specifications and identifiers
physical description
Inside diameter9-1/2 inch ID
Stated in the most descriptive title.
Application contextESC chuck wafer guard ring
Stated in the strongest title.
Material clueceramic ring
One title states ceramic; verify material and condition.
RevisionRev. A
Appears in titles and should be verified per unit.
Applications
ESC chuck assemblieswafer edge hardwaresemiconductor process chamber consumableswafer guard ringESC chuck perimeter componentLam chamber consumable/spare
How it works

A wafer guard ring is a ring-shaped chamber component used around the wafer or chuck area.

Guard rings can influence wafer-edge environment, plasma/process boundaries, and physical protection around chuck hardware.

Technical guide
ceramic

Ceramic chamber parts are commonly used where thermal, plasma, or chemical resistance is needed; exact grade is not confirmed.

ESC

Electrostatic chuck systems hold wafers using electrostatic force.

ESC
Electrostatic chuck.
ID
Inside diameter.
What to verify before purchase
  • ID, OD, thickness, and notch features
  • material and coating
  • Rev. A applicability
  • chips, cracks, plasma erosion, or contamination
Confirm with the seller
  • specific Lam chamber model
  • exact ceramic composition
  • new or refurb status

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

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